2 results
A Novel Gap Narrowing Process for Creating High Aspect Ratio Transduction Gaps for MEM HF Resonators
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1139 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1139-GG01-05
- Print publication:
- 2008
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- Article
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Stacked Boron Doped Poly-Crystalline Silicon-Germanium Layers: an Excellent MEMS Structural Material
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1075 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1075-J05-02
- Print publication:
- 2008
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- Article
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