1 results
Microstructure of Thick Polycrystalline Silicon Films for MEMS Application
-
- Journal:
- Microscopy and Microanalysis / Volume 8 / Issue S02 / August 2002
- Published online by Cambridge University Press:
- 01 August 2002, pp. 666-667
- Print publication:
- August 2002
-
- Article
-
- You have access
- Export citation