AIZO (Al and In codoped ZnO) thin films were deposited on soda lime glass
substrates by the ultrasonic spray pyrolysis (USP) technique. The spraying
solution was prepared from zinc acetate dihydrate, aluminum acetyl acetonate and
indium acetate. Depositions were carried out at three different temperatures,
425, 450 and 475 °C. Structural, morphological, optical and electrical
properties were examined with respected to the deposition temperatures. All AIZO
films grown with (002) preferential orientation confirmed from X-ray diffraction
analysis. Hexagonal nanostructures were observed from Scanning electron
microscopy (SEM) analysis. Minimum electrical resistivity of 2.52
x10-3 Ω-cm was achieved for AIZO films.