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Microstructuring of Silica and Polymethylmethacrylate Glasses by Femtosecond Irradiation for MEMS Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 687 / 2001
- Published online by Cambridge University Press:
- 15 March 2011, B5.25
- Print publication:
- 2001
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- Article
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