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Dry Etching Techniques of Amorphous Silicon for Suspended Metal Membrane RF MEMS Capacitors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 729 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, U2.7
- Print publication:
- 2002
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- Article
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LPCVD Deposition Techniques for Nanograin sub-10nm Polysilicon Ultra-thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 686 / 2001
- Published online by Cambridge University Press:
- 15 March 2011, A6.4
- Print publication:
- 2001
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- Article
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