1 results
Photo-Assisted Mocvd Growth of High Dielectric (Ba,Sr)TiO3 Thin Films on Ni/TiN/Si Substrate for Dram Application
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 596 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 49
- Print publication:
- 1999
-
- Article
- Export citation