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Intrinsic, n- and p-Doped a-Si:H Thin Films Grown by DC Magnetron Sputtering with Doped Targets
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- Journal:
- MRS Online Proceedings Library Archive / Volume 557 / 1999
- Published online by Cambridge University Press:
- 15 February 2011, 31
- Print publication:
- 1999
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- Article
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