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Sputtering in a glow discharge lamp of the Grimm type

Published online by Cambridge University Press:  27 February 2003

K. I. Grais ,
M. A. Eid ,
E. A. Al-Ashkar ,
K. A. Eid  and
M. S. Abd-El-Aal
K. I. Grais*
Affiliation:
Spectroscopy Department, Physics Division, National Research Centre, Dokki, Giza, Egypt
M. A. Eid
Affiliation:
Spectroscopy Department, Physics Division, National Research Centre, Dokki, Giza, Egypt
E. A. Al-Ashkar
Affiliation:
Spectroscopy Department, Physics Division, National Research Centre, Dokki, Giza, Egypt
K. A. Eid
Affiliation:
Spectroscopy Department, Physics Division, National Research Centre, Dokki, Giza, Egypt
M. S. Abd-El-Aal
Affiliation:
Spectroscopy Department, Physics Division, National Research Centre, Dokki, Giza, Egypt
*
khairiiggrais@hotmail.com
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Abstract

The sputtering rate (Q), in glow discharge, was measured as a function of the discharge power (W). An empirical relation could be obtained having the form $Q = K^{**} W^m$, with the constants $K^{**}$ and m. The equation was compared with theoretical derived equation of Takatsu and Toda, which is based on the mechanism of momentum transfer. Takatsu and Toda theoretical relationship had to be rearranged to obtain the same relationship between the sputtering rate (Q) and the discharge (W). The experimental data obtained in the present work as well as by Boumans and Takatsu and Toda were analysed on the bases of the obtained equation. This analysis revealed that the constants appearing in the Q-W equations are pressure dependent. These dependences are described and discussed.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 21 , Issue 3 , March 2003 , pp. 213 - 223
Copyright
© EDP Sciences, 2003

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