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Resonance phenomena in microwave nonmagnetized plasma source. Plasmachemical application

Published online by Cambridge University Press:  30 April 2008

N. K. Berezhetskaya ,
V. Kop'ev ,
I. A. Kossyi ,
M. Misakyan ,
I. M. Taktakishvili ,
S. Temchin  and
Y. D. Lee
N. K. Berezhetskaya
Affiliation:
Prokhorov General Physics Institute of RAS, Moscow, Russia
V. Kop'ev
Affiliation:
Prokhorov General Physics Institute of RAS, Moscow, Russia
I. A. Kossyi*
Affiliation:
Prokhorov General Physics Institute of RAS, Moscow, Russia
M. Misakyan
Affiliation:
Prokhorov General Physics Institute of RAS, Moscow, Russia
I. M. Taktakishvili
Affiliation:
Prokhorov General Physics Institute of RAS, Moscow, Russia
S. Temchin
Affiliation:
Prokhorov General Physics Institute of RAS, Moscow, Russia
Y. D. Lee
Affiliation:
Samsung Electronics Co., LTD, Korea
*
kossyi@fpL.gpi.ru
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Abstract

Scheme of coaxial microwave gas-discharge plasma source based on a “plasma resonance” phenomenon is presented. Possibility of conditions realization at which energy of accelerated in the “resonance” electrons goes into ionization processes (in volume of chamber outside of “resonance” region) is discussed. Results of experimental investigation of a coaxial microwave plasmatron in which “resonance” mechanisms have been manifested are presented. A plasmachemical reactor based on a “resonance” plasmatron is described. The data on plasmachemical decomposition of CF2Cl2 are displayed.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 42 , Issue 3 , June 2008 , pp. 327 - 337
Copyright
© EDP Sciences, 2008

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