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OVPD® technology

Published online by Cambridge University Press:  27 March 2009

N. Meyer ,
M. Rusu ,
S. Wiesner ,
S. Hartmann ,
D. Keiper ,
M. Schwambera ,
M. Gersdorff ,
M. Kunat ,
M. Heuken  and
W. Kowalsky
...Show all authors
N. Meyer*
Affiliation:
AIXTRON AG, Kackertstr. 15-17, 52072 Aachen, Germany
M. Rusu
Affiliation:
Solarenergieforschung (SE2), Helmholtz-Zentrum Berlin für Materialien und Energie, Germany
S. Wiesner
Affiliation:
Solarenergieforschung (SE2), Helmholtz-Zentrum Berlin für Materialien und Energie, Germany
S. Hartmann
Affiliation:
TU Braunschweig, Schleinitzstraße 22, 38106 Braunschweig, Germany
D. Keiper
Affiliation:
AIXTRON AG, Kackertstr. 15-17, 52072 Aachen, Germany
M. Schwambera
Affiliation:
AIXTRON AG, Kackertstr. 15-17, 52072 Aachen, Germany
M. Gersdorff
Affiliation:
AIXTRON AG, Kackertstr. 15-17, 52072 Aachen, Germany
M. Kunat
Affiliation:
AIXTRON AG, Kackertstr. 15-17, 52072 Aachen, Germany
M. Heuken
Affiliation:
AIXTRON AG, Kackertstr. 15-17, 52072 Aachen, Germany
W. Kowalsky
Affiliation:
TU Braunschweig, Schleinitzstraße 22, 38106 Braunschweig, Germany
M. Ch. Lux-Steiner
Affiliation:
Solarenergieforschung (SE2), Helmholtz-Zentrum Berlin für Materialien und Energie, Germany
*
Meyer@aixtron.com
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Abstract

The precise control of organic thin film processing by organic vapor phase deposition (OVPD®) is presented and analyzed on device level. OVPD® offers accurate and individual control of deposition layer properties like mixing of several materials (co-deposition) and the control of various morphologies by a wide process parameter space given by, e.g. substrate temperature, deposition rate and pressure. The benefit of precise co-deposition is demonstrated by an OLED with a sensitive twofold-doped emissive layer and revealed a doping level of 0.26% for the red dopant with a std. dev. of 0.38%. The effect of the various morphologies is investigated by optimizing the efficiency of molecular organic solar cells consisting of copper phthalocyanine (CuPc) and C60. With defined process parameters efficiencies of up to 3.0% were demonstrated.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 46 , Issue 1: International Symposium on Flexible Organic Electronics (IS-FOE) , April 2009 , 12506
Copyright
© EDP Sciences, 2009

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References

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