Hostname: page-component-76fb5796d-22dnz Total loading time: 0 Render date: 2024-04-26T10:32:16.206Z Has data issue: false hasContentIssue false

Combined analysis with WDS/EDS spectrometers in SEM

Published online by Cambridge University Press:  17 July 2008

M. Briant*
Affiliation:
Elexience, 9 rue des Petits-Ruisseaux, BP 61, 91371 Verrières-le-Buisson Cedex, France CEA, IRAMIS, Service des Photons Atomes et Molécules, 91191 Gif-sur-Yvette, France CNRS, Laboratoire Francis Perrin, 91191 Gif-sur-Yvette, France
D. Balloy
Affiliation:
École Centrale de Lille, Pôle Fonderie, BP 48, 59651 Villeneuve d'Ascq Cedex, France
Get access

Abstract

Wavelength dispersive and energy dispersive spectrometers were fitted on a scanning electron microscope (SEM) in order to perform combined analysis and to use the advantages of the two spectrometers. The combined system is simple, adaptable to a lot of SEM and cheaper than Electron Probe Micro Analyzer (EPMA). Its originality is to combine two spectrometers: a parallel beam WDS with a silicon drift EDS spectrometer. This makes analysis easier (easy to find the optimum parameters to set up, as beam current) and saves time. With this system, quantitative analysis is more accurate than with EDS alone, better resolution can be achieved, less overlap of lines and better spatial resolution can be obtained. A sample recently studied by a microanalyst association was analysed with the present system in order to test its efficiency. In a second series of analyses, a sample showing difficulties (peak overlaps, small phases, low mass fraction) was analysed and good results were achieved.

Keywords

Type
Research Article
Copyright
© EDP Sciences, 2008

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Reed, S., J. Res. Natl. Inst. Stand. Technol. 107, 497 (2002) CrossRef
Newbury, D.E., J. Res. Natl. Inst. Stand. Technol. 107, 605 (2002) CrossRef
Moran, K., Wuhrer, R., Microchim. Acta 155, 59 (2006) CrossRef
J. Ruste, GN-MEBA (2005), http://www.gn-meba.org
D.B. O'Hara, US Patent No. 5 682 415 (1997), http://www.freepatentsonline.com/
J.J. McCarty, J.V. Howard, US Patent No. 5 926 522 (1999), http://www.freepatentsonline.com/
Mikli, V., Microchim. Acta 155, 205 (2006) CrossRef
Ancey, M., Bastenaire, F., Tixier, R., J. Phys. D: Appl. Phys. 10, 817 (1977) CrossRef
Kawai, J., Nakajima, K., Gohshi, Y., Spectrochim. Acta Part B: Atom. Spectrosc. 48, 1281 (1993) CrossRef
Aßmann, A., Dellith, J., Wendt, M., Michrochim. Acta 155, 83 (2006) CrossRef
Aßmann, A., Dellith, J., Wendt, M., Microchim. Acta 155, 87 (2006) CrossRef
D. Drouin, A. R'eal Couture, D. Joly, X. Tastet, V. Aimez,
Gauvin, R., Scanning 29, 92 (2007)
S. Nagender Naidu, A. Sriramamurthy, P. Rama Rao, Alloy Phase Diagrams, Vol. 3, edited by Hugh Backer (1992), p. 206