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Real-time high-resolution topographic imagery using interference microscopy

Published online by Cambridge University Press:  15 November 2002

A. Dubois ,
L. Vabre ,
A.-C. Boccara ,
P. C. Montgomery ,
B. Cunin ,
Y. Reibel  and
C. Draman
A. Dubois*
Affiliation:
Laboratoire d'Optique Physique, École Supérieure de Physique et Chimie Industrielles, CNRS, UPR A0005, 10 rue Vauquelin, 75231 Paris Cedex 5, France
L. Vabre
Affiliation:
Laboratoire d'Optique Physique, École Supérieure de Physique et Chimie Industrielles, CNRS, UPR A0005, 10 rue Vauquelin, 75231 Paris Cedex 5, France
A.-C. Boccara
Affiliation:
Laboratoire d'Optique Physique, École Supérieure de Physique et Chimie Industrielles, CNRS, UPR A0005, 10 rue Vauquelin, 75231 Paris Cedex 5, France
P. C. Montgomery
Affiliation:
Laboratoire de Physique et Application des Semiconducteurs (PHASE), CNRS, UPR 292, 23 rue du Loess, 67037 Strasbourg, France
B. Cunin
Affiliation:
Laboratoire de Physique et Application des Semiconducteurs (PHASE), CNRS, UPR 292, 23 rue du Loess, 67037 Strasbourg, France
Y. Reibel
Affiliation:
Laboratoire de Physique et Application des Semiconducteurs (PHASE), CNRS, UPR 292, 23 rue du Loess, 67037 Strasbourg, France
C. Draman
Affiliation:
Laboratoire des Sciences de l'Image, de l'Informatique et de la Télédétection (LSIIT), CNRS, UPRES-A 7005/ULP, École Nationale Supérieure de Physique de Strasbourg, boulevard Sébastien Brant, 67400 Illkirch, France
*
dubois@optique.espci.fr
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Abstract

New instrumentation has been developed that is dedicated to the measurement of surface morphology with high resolutions and short acquisition times. Sinusoidal phase-shifting interferometry is demonstrated to provide within an acquisition time of only a few milliseconds topographic images with ~1 nm height precision, ~1 μm lateral resolution, and a few tens of pm sensitivity. A white-light scanning microscope is also under development, using an in-house developed high speed, intelligent CCD camera, the first tests of which demonstrate the feasibility of providing topographic images of deep surface relief (several microns to several tens of microns) within less than 0.3 s. The useful lateral field of view can be extended by employing image “stitching” while maintaining a high lateral resolution. 


Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 20 , Issue 3: ACO: Action Coordonnée Optique , December 2002 , pp. 169 - 175
Copyright
© EDP Sciences, 2002

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References

Creath, K., Prog. Opt. 26, 349 (1988) CrossRef
Schwider, J., Prog. Opt. 28, 271 (1990) CrossRef
J.E. Greivenkamp, J.H. Bruning, in Optical Shop Testing, edited by D. Malacara (Wiley, New York, 1991)
Bhushan, B., Wyant, J.C., Koliopoulos, C.L., Appl. Opt. 24, 1489 (1985) CrossRef
M. Davidson, K. Kaufman, I. Mazor, F. Cohen, in Proc. SPIE 775, 233 (1987)
Kino, G.S., Chim, S.S.C., Appl. Opt. 29, 3775 (1990) CrossRef
Chim, S.S.C., Kino, G.S., Appl. Opt. 30, 2197 (1991) CrossRef
Chim, S.S.C., Kino, G.S., Appl. Opt. 31, 2550 (1992) CrossRef
Chang, F.C., Kino, G.S., Appl. Opt. 37, 3471 (1998) CrossRef
Hariharan, P., Oreb, B.F., Eiju, T., Appl. Opt. 26, 2504 (1987) CrossRef
Larkin, K.G., Oreb, B.F., J. Opt. Soc. Am. A 9, 1740 (1992) CrossRef
Surrel, Y., Appl. Opt. 39, 3598 (1993) CrossRef
Schwider, J., Falkenstorfer, O., Schreiber, H., Zoller, A., Streibl, N., Opt. Eng. 32, 1883 (1993) CrossRef
Zhao, B., Surrel, Y., Opt. Eng. 34, 2821 (1995)
de Groot, P., Appl. Opt. 34, 4723 (1995) CrossRef
Schmit, J., Creath, K., Appl. Opt. 34, 3610 (1995) CrossRef
Surrel, Y., Appl. Opt. 35, 51 (1996) CrossRef
D.C. Ghilia, M.D. Pritt, Two-Dimensional Phase Unwrapping (Wiley Inter-science, 1998)
Stumpf, K.D., Opt. Eng. 18, 648 (1979) CrossRef
Wyant, J.C., Appl. Opt. 14, 2622 (1975) CrossRef
Sasaki, O., Okazaki, H., Appl. Opt. 25, 3137 (1986) CrossRef
Sasaki, O., Okazaki, H., Sakai, M., Appl. Opt. 26, 1089 (1987) CrossRef
Dubois, A., J. Opt. Soc. Am. A 18, 1972 (2001) CrossRef
Sheppard, C.J.R., Larkin, K.G., Appl. Opt. 34, 4731 (1995) CrossRef
Dubois, A., Selb, J., Vabre, L., Boccara, A.C., Appl. Opt. 39, 2323 (2000) CrossRef
Bruce, C.F., Thornton, B.S., J. Sci. Instrum. 34, 203 (1957) CrossRef
Mykura, H., Rhead, G.E., J. Sci. Instrum. 40, 313 (1963) CrossRef
Sheppard, C.J.R., Matthews, H.J., JOSA A 4, 1354 (1987) CrossRef
Creath, K., Appl. Opt. 28, 333 (1989)
Biegen, J.F., Appl. Opt. 28, 1972 (1989) CrossRef
Schulz, G., Elssner, K.-E., Appl. Opt. 30, 4500 (1991) CrossRef
Creath, K., Wyant, J.C., Appl. Opt. 29, 3823 (1990) CrossRef
Cheng, Y.Y., Wyant, J.C., Appl. Opt. 26, 2810 (1987) CrossRef
de Groot, P.J., Appl. Opt. 33, 5948 (1994) CrossRef
Lee, B.S., Strand, T.C., Appl. Opt. 29, 3784 (1990) CrossRef
Doi, T., Toyoda, K., Tanimura, Y., Appl. Opt. 36, 7157 (1979) CrossRef
Montgomery, P.C., Kazmierski, C., Bouchoule, S., Inst. Phys. Conf. Series 160, 51 (1997)
Dubois, A., Boccara, A.C., Lebec, M., Opt. Lett. 24, 309 (1999) CrossRef
Montgomery, P.C., Fillard, J.P., Proc. SPIE 1755, 12 (1992) CrossRef
Caber, P.J., Appl. Opt. 32, 3438 (1993) CrossRef
De Groot, P., Deck, L., J. Mod. Opt. 42, 389 (1995) CrossRef
Sandoz, P., Opt. Lett. 22, 1065 (1997) CrossRef
Larkin, K.G., J. Opt. Soc. Am. A 13, 832 (1996) CrossRef
P.C. Montgomery, A. Benatmane, J.P. Ponpon, E. Fogarassy, Proceedings DRIP IX 2001 (to be published) Mater. Sci. Eng. B
M.A. Schmucker, B.W. Becker, Method of combining multiple sets of overlapping surface-profile interferometric data to produce a continuous composite map, US patent No. 5, 987 (1996)
M. Flury, A. Benatmane, J. Fontaine, P.C. Montgomery, P. Gérard, T. Engel, J.P. Schunck, Rapid prototyping of Diffractive Optical Elements (DOEs) for high power lasers using Laser Ablation Lithography fabrication and Coherence Probe Microscopy (CPM) analysis (submitted) Opt. Eng.
Ponpon, J.P., Montgomery, P.C., Sieskind, M., Amann, M., Appl. Surf. Sci. 165, 233 (2000) CrossRef