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A 4-degrees-of-freedom microrobot with nanometer resolution

Published online by Cambridge University Press:  09 March 2009

J.-M. Breguet  and
Ph. Renaud
Ph. Renaud
Affiliation:
Institut de microtechnique (IMT), Swiss Federal Institute of Technology (EPFL), CH–1015 Lausanne (Switzerland)
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Summary

A new type of microrobot is described. Its simple and compact design is believed to be of promise in the microrobotics field. Stepping motion allows speeds up to 4mm/s. Resolution smaller than 10 nm is achievable. Experiments in an open-loop motion demonstrated a repeatability better than 50µm on a 10 mm displacement at an average speed of 0.25 mm/s. A position feedback based on a microvision system will be developed in order to achieve a submicron absolute position accuracy.

Keywords

MicrorobotNanometer resolutionCompact design.
Type
Article
Information
Robotica , Volume 14 , Issue 2 , March 1996 , pp. 199 - 203
Copyright
Copyright © Cambridge University Press 1996

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