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Micro X-ray flourescence instrument developed in combination with atomic force microscope

Published online by Cambridge University Press:  01 March 2012

K. Tsuji ,
T. Emoto ,
Y. Matsuoka ,
Y. Miyatake ,
T. Nagamura  and
X. Ding
K. Tsuji*
Affiliation:
Department of Applied Chemistry, Graduate School of Engineering, Osaka City University, 3-3-138 Sugimoto, Sumiyoshi-ku, Osaka 558-8585, Japan
T. Emoto
Affiliation:
Department of Applied Chemistry, Graduate School of Engineering, Osaka City University, 3-3-138 Sugimoto, Sumiyoshi-ku, Osaka 558-8585, Japan
Y. Matsuoka
Affiliation:
Department of Applied Chemistry, Graduate School of Engineering, Osaka City University, 3-3-138 Sugimoto, Sumiyoshi-ku, Osaka 558-8585, Japan
Y. Miyatake
Affiliation:
Unisoku Co., 2-4-3 Kasugano, Hirakata 594-1111, Japan
T. Nagamura
Affiliation:
Unisoku Co., 2-4-3 Kasugano, Hirakata 594-1111, Japan
X. Ding
Affiliation:
Institute of Low Energy Nuclear Physics, Beijing Normal University, No. 19, Xin Jie Kou Wai Da Jie, Beijing 100875, China
*
a)Electronic mail: tsuji@a-chem.eng.osaka-cu.ac.jp
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Abstract

A new micro-X-ray flourescence (XRF) instrument was developed in combination with an atomic force microscope (AFM). A small pinhole of 5 or 10 μm was made on the AFM cantilever. The center of the micro-X-ray beam generated by a polycapillary X-ray lens was passed through the pinhole. The present experiment demonstrated that the size of the original X-ray beam of 48 μm produced by the polycapillary lens was reduced to about 10 μm. This instrument enables both observation of the surface morphology by the AFM and elemental analysis by micro-XRF.

Type
XRD Instrumentation and Techniques
Information
Powder Diffraction , Volume 20 , Issue 2 , June 2005 , pp. 137 - 140
Copyright
Copyright © Cambridge University Press 2005

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