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D058 Determination of local strain field in SOI lines using high resolution X-ray diffraction

Published online by Cambridge University Press:  20 May 2016

A. Loubens
Affiliation:
Université Paul Cézanne, Marseille, France Ecole Nationale Supérieure des Mines de Saint-Etienne, Gardanne, France
M. Gailhanou
Affiliation:
Université Paul Cézanne, Marseille, France
O. Thomas
Affiliation:
Université Paul Cézanne, Marseille, France
J.-S. Micha
Affiliation:
CEA-Grenoble/DRFMC/SI3M/PCM, Grenoble, France
R. Fortunier
Affiliation:
Ecole Nationale Supérieure des Mines de Saint-Etienne, Gardanne, France
B. Charlet
Affiliation:
CEA Leti, Grenoble, France

Abstract

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Type
Denver X-Ray Conference
Copyright
Copyright © Cambridge University Press 2006

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