Research Article
Reliability Implications of Defects in High Temperature Annealed Si/SiO2/Si Structures
- Published online by Cambridge University Press: 22 February 2011, 3
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Comparison between SiO2 Films and Nitridated Oxides in N2O Ambient in Terms of Bulk/Interface Trapping Properties
- Published online by Cambridge University Press: 22 February 2011, 13
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Impact of Various In Situ Preoxidation Process Perturbations on Gate Oxide Quality
- Published online by Cambridge University Press: 22 February 2011, 25
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Comparing the Structure and Behavior of Point Defects in Silicon Oxynitride Gate Dielectrics formed by NH3-Nitridation and N2O-Growth/Nitridation
- Published online by Cambridge University Press: 22 February 2011, 31
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The Roles of Several E′ Variants in Thermal Gate Oxide Reliability
- Published online by Cambridge University Press: 22 February 2011, 37
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Comparison of Film Quality and Step Coverage for Silicon Dioxide Dielectrics Formed by RTCVD Using Tetraethoxysilane and Silane
- Published online by Cambridge University Press: 22 February 2011, 43
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Reliability Study of Plasma Etching Damage in ULSI Process
- Published online by Cambridge University Press: 22 February 2011, 51
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Effect of Power on the Properties of SiO2 Films Produced by Plasma-Enhanced Chemical Vapour Deposition
- Published online by Cambridge University Press: 22 February 2011, 57
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Effect of Phosphorus-Doped Polysilicon Anneal on Thin Oxide Reliability as Probed with X-Ray Damage Characterization
- Published online by Cambridge University Press: 22 February 2011, 63
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Excess Conductance of MOS Diodes Suffered Current Stress and Elucidation of Induced Interface States
- Published online by Cambridge University Press: 22 February 2011, 69
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Characterization of PECVD SixOyNz:H Films and its Correlation to Device Performance and Reliability
- Published online by Cambridge University Press: 22 February 2011, 75
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Diffusion-Induced Precipitation in Arsenosilicate Glass (AsSG)
- Published online by Cambridge University Press: 22 February 2011, 83
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Adhesion Measurements of Thin Films by Several Methods
- Published online by Cambridge University Press: 22 February 2011, 91
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Reliability of Optical Coatings Submitted to a High Power Continuous Wave Laser Beam
- Published online by Cambridge University Press: 22 February 2011, 103
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An Analysis by Scanning Acoustic Microscopy of the Mechanical Stability of PSG and Si3N4 Passivation Films
- Published online by Cambridge University Press: 22 February 2011, 115
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Hrem Structure Characterization of Relaxed Interfaces in Covalently Bonded Materials
- Published online by Cambridge University Press: 22 February 2011, 121
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Effects of Residual Stress on the Measurement of Hardness and Elastic Modulus using Nanoindentation
- Published online by Cambridge University Press: 22 February 2011, 127
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Determination of the Mechanical Behaviour of Thin Films on Substrate Systems from Micromechanical Experiments
- Published online by Cambridge University Press: 22 February 2011, 135
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Calculation of Stresses in Strained Semiconductor Layers
- Published online by Cambridge University Press: 22 February 2011, 149
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The Role of Hydrogen in Current-Induced Degradation of GaAs/AlGaAs Heterojunction Bipolar Transistors
- Published online by Cambridge University Press: 22 February 2011, 161
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