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X-Ray Scattering Studies of Multilayer Interfaces

  • M. K. Sanyal (a1), S. K. Sinha (a1), A. Gibaud (a1), S. K. Satija (a2), C. F. Majkrzak (a2) and H. Homma (a3)...


The results of specular and diffuse x-ray scattering studies of multilayers are discussed. We show here that such studies can yield detailed statistical information about the interfacial roughness and morphology. Results on a GaAs/AlAs multilayer are presented and the data is analyzed within the Born approximation.



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1. Sinha, S.K., Sirota, E.B., Gasoff, S. and Stanley, H.B.. Phys. Rev. B 38, 2297 (1988).
2. Sanyal, M.K., Sinha, S.K., Huang, K.G., and Ocko, B.M.. Phys. Rev. Lett. 66, 628 (1991).
3. Sinha, S.K., Sanyal, M.K., Gibaud, A., Satija, S.K., Majkrzak, C.F., and Homma, H., presented at the NATO Advanced Study Institute Conference, Crete, Greece, 1990 (unpublished).


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