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X-Ray Reflectivity of Ultra-Thin Diamond-Like Carbon Films

Published online by Cambridge University Press:  21 March 2011

B. K. Tanner ,
A. LiBassi ,
A. C. Ferrari  and
J. Robertson
B. K. Tanner
Affiliation:
Physics Department, University of Durham, Durham, DH1 3LE, UK
A. LiBassi
Affiliation:
Physics Department, University of Durham, Durham, DH1 3LE, UK Now at: Dipartmento di Ingegneria Nucleare, Politecnico di Milano, 20133 Milano, Italy
A. C. Ferrari
Affiliation:
Engineering Department, University of Cambridge, Cambridge, CB2 1PZ, UK
J. Robertson
Affiliation:
Engineering Department, University of Cambridge, Cambridge, CB2 1PZ, UK
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Abstract

Grazing incidence x-ray reflectivity has been employed to investigate ultra-thin films of tetrahedral amorphous carbon (ta-C) grown with an S-bend filtered cathodic vacuum arc. The results indicate that x-ray reflectivity can be used as a metrological tool for thickness measurements on films as thin as 0.5 nm, which is lower than the range required for carbon overcoats for magnetic hard disks and sliders if they are to reach storage densities of 100 Gbits/in2. The density of the films was derived from the best-fit to simulated reflectivity profiles from models for the structural parameters. In such thin films, the x-rays are reflected mainly at the film substrate interface, rather than the outer surface, so that the film density is derived from analysisof the oscillations of the post-critical angle reflectivity.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 675: Symposium W – Nanotubes, Fullerenes, Nanostructured and Disordered Carbon , 2001 , W11.4.1
Copyright
Copyright © Materials Research Society 2001

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References

REFERNCES

1. McKenzie, D.R., Muller, D., Pailthorpe, B.A., Phys. Rev. Lett 67, 773 (1991)Google Scholar
2. Fallon, P.J., Veerasamy, V.S., Davis, C.A., Robertson, J., Amaratunga, G.A.J., Milne, W.I., Koskinen, J., Phys. Rev. B 48, 4777 (1993)Google Scholar
3. Schwan, J., Ulrich, S., Theel, T., Roth, H., Ehrhardt, H., Beker, P., Silva, S.R.P., J. Appl. Phys. 82, 6024 (1997)Google Scholar
4. Libassi, A., Ferrari, A. C., Stolojan, V., Tanner, B. K., Robertson, J. and Brown, L. M., Diamond Relat. Mater. 9, 771 (2000)Google Scholar
5. Ferrari, A C, Bassi, A Li, Tanner, B K, Stolojan, V, Yuan, J, Brown, L M, Rodil, S E, Kleinsorge, B and Robertson, J, Phys Rev B 61 11089 (2000).Google Scholar
6. Teo, K. B. K., Rodil, S. E., Tsai, J. T. H., Ferrari, A. C., Robertson, J., and Milne, W. I., J. Appl. Phys. 89, 3706 (2001)Google Scholar
7. Wormington, M, Panaccione, C, Matney, K M and Bowen, D K, Phil. Trans. Roy. Soc. 357 2827 (1999)Google Scholar
8. Sinha, S K, Sirota, E B, Garoff, S and Stanley, H B Phys Rev. B 38 2973 (1988)Google Scholar
9. Wormington, M, Pape, I, Hase, T P A, Tanner, B K and Bowen, D K, Phil. Mag. Letts 74 211 (1996)Google Scholar
10. Davis, C. A., Amaratunga, G. A. J., Phys. Rev. Lett. 80, 3280 (1998)Google Scholar
11. Bowen, D K and Deslattes, R D, in: Characterization and Metrology for ULSI Technology 2000, eds. Seiler, DG, Diebold, AC, Shaffner, TJ, McDonald, R, Bullis, WM, Smith, PJ and Secula, EM, Am. Inst. Phys. Conf. Proc. 550, (2001) 570 Google Scholar
12. Beghi, M.G., Bottani, C. E., LiBassi, A., Ferrari, A.C., Teo, K.B.K., Roberstson, J., these proceedings.Google Scholar