Skip to main content Accessibility help

X-Ray Reflectivity of Ultra-Thin Diamond-Like Carbon Films

  • B. K. Tanner (a1), A. LiBassi (a1) (a2), A. C. Ferrari (a3) and J. Robertson (a3)


Grazing incidence x-ray reflectivity has been employed to investigate ultra-thin films of tetrahedral amorphous carbon (ta-C) grown with an S-bend filtered cathodic vacuum arc. The results indicate that x-ray reflectivity can be used as a metrological tool for thickness measurements on films as thin as 0.5 nm, which is lower than the range required for carbon overcoats for magnetic hard disks and sliders if they are to reach storage densities of 100 Gbits/in2. The density of the films was derived from the best-fit to simulated reflectivity profiles from models for the structural parameters. In such thin films, the x-rays are reflected mainly at the film substrate interface, rather than the outer surface, so that the film density is derived from analysisof the oscillations of the post-critical angle reflectivity.



Hide All
1. McKenzie, D.R., Muller, D., Pailthorpe, B.A., Phys. Rev. Lett 67, 773 (1991)
2. Fallon, P.J., Veerasamy, V.S., Davis, C.A., Robertson, J., Amaratunga, G.A.J., Milne, W.I., Koskinen, J., Phys. Rev. B 48, 4777 (1993)
3. Schwan, J., Ulrich, S., Theel, T., Roth, H., Ehrhardt, H., Beker, P., Silva, S.R.P., J. Appl. Phys. 82, 6024 (1997)
4. Libassi, A., Ferrari, A. C., Stolojan, V., Tanner, B. K., Robertson, J. and Brown, L. M., Diamond Relat. Mater. 9, 771 (2000)
5. Ferrari, A C, Bassi, A Li, Tanner, B K, Stolojan, V, Yuan, J, Brown, L M, Rodil, S E, Kleinsorge, B and Robertson, J, Phys Rev B 61 11089 (2000).
6. Teo, K. B. K., Rodil, S. E., Tsai, J. T. H., Ferrari, A. C., Robertson, J., and Milne, W. I., J. Appl. Phys. 89, 3706 (2001)
7. Wormington, M, Panaccione, C, Matney, K M and Bowen, D K, Phil. Trans. Roy. Soc. 357 2827 (1999)
8. Sinha, S K, Sirota, E B, Garoff, S and Stanley, H B Phys Rev. B 38 2973 (1988)
9. Wormington, M, Pape, I, Hase, T P A, Tanner, B K and Bowen, D K, Phil. Mag. Letts 74 211 (1996)
10. Davis, C. A., Amaratunga, G. A. J., Phys. Rev. Lett. 80, 3280 (1998)
11. Bowen, D K and Deslattes, R D, in: Characterization and Metrology for ULSI Technology 2000, eds. Seiler, DG, Diebold, AC, Shaffner, TJ, McDonald, R, Bullis, WM, Smith, PJ and Secula, EM, Am. Inst. Phys. Conf. Proc. 550, (2001) 570
12. Beghi, M.G., Bottani, C. E., LiBassi, A., Ferrari, A.C., Teo, K.B.K., Roberstson, J., these proceedings.

X-Ray Reflectivity of Ultra-Thin Diamond-Like Carbon Films

  • B. K. Tanner (a1), A. LiBassi (a1) (a2), A. C. Ferrari (a3) and J. Robertson (a3)


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed