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Xps Study of the Nitridation Process of A Polytitanocarbosilane into Si-Ti-N-O Ceramics

Published online by Cambridge University Press:  25 February 2011

G. Granozzi ,
A. Glisenti ,
R. Bertoncello  and
G. D. Soraru
G. Granozzi
Affiliation:
Dipartimento di Chimica Inorganica, Università di Padova, Via Loredan 4, 35131 Padova, Italy.
A. Glisenti
Affiliation:
Dipartimento di Chimica Inorganica, Università di Padova, Via Loredan 4, 35131 Padova, Italy.
R. Bertoncello
Affiliation:
Dipartimento di Chimica Inorganica, Università di Padova, Via Loredan 4, 35131 Padova, Italy.
G. D. Soraru
Affiliation:
Dipartimento di Ingegneria dei Materiali, Università di Trento, 38050, Mesiano-Trcnto, Italy.
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Abstract

The nitridation process of a polytitanocarbosilane, leading to the formation of a Si-Ti-N-O ceramics, has been investigated mainly by means of X-ray photoelectron spectroscopy (XPS). Ti2p spectra collected on samples fired at various stages of the transformation process clearly shown that Ti-N bonds of TiOxNy mixed units start to form at 500 °C. By increasing the firing temperature, the Ti2p peak shifts toward values typical of titanium nitride ceramics, so indicating the progressive nitrogen enrichment of the mixed units up to the formation of a TiN phase.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 271: Symposium N – Better Ceramics Through Chemistry V , 1992 , 899
Copyright
Copyright © Materials Research Society 1992

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References

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