Skip to main content Accessibility help
×
Home

Vacancy-type and electrical defects in amorphous silicon probed by positrons and electrons

  • S. Roorda (a1), R. A. Hakvoort (a2), A. van Veen (a2), P. A. Stolk (a1) and F. W. Saris (a1)...

Abstract

Amorphous Si has been investigated by variable-energy positron annihilation spectroscopy (PAS) and lifetime measurements of optically generated free carriers. The density of positron-trapping defects can be reduced by thermal annealing at 500°C. Simultaneously, the density of bandgap states is reduced as indicated by an increased photocarrier lifetime. Hydrogen, implanted and annealed at 150°C, leads to an increased photocarrier lifetime and reduced positron trapping. It appears that (some of) the electrical defects are associated with positron-trapping, and therefore possibly vacancy-type, structural defects. Finally, both methods have been used to detect small amounts of ion irradiation damage in amorphous Si.

Copyright

References

Hide All
1 Turnbull, D., in: ‘Beam-solid interactions and phase transformations’, edited by Kurz, H., Olson, G. L., and Poate, J. M. (Mater. Res. Soc. Symp. Proc. 51, MRS Pittsburgh 1986) p. 71.
2 Roorda, S., Sinke, W. C., Poate, J. M., Jacobson, D. C., Dierker, S., Dennis, B. S., Eaglesham, D. J., Spaepen, F., and Fuoss, P., Phys. Rev. B44, 3702 (1991).
3 Coffa, S. and Poate, J. M., Appl. Phys. Lett. 59, 2296 (1991).
4 Schultz, P. J. and Lynn, K. G., Rev. Mod. Phys. 60, 701 (1988).
5 Roorda, S., Hakvoort, R.A., van Veen, A., Stolk, P.A., and Saris, F.W., unpublished.
6 van Veen, A., J.Trace and Microprobe Techn. 8, 1 (1990).
7 van Veen, A., Schut, H., de Vries, J., Hakvoort, R. A., and IJpma, M. R., in: ‘Slow positron beams for solids and surfaces’, Eds.: Schultz, P. J., Massoumi, G. R., and Simpson, P. J. (AIP Conf. Proc. 218) p.171(1990).
8 Fork, R. L., Greene, B. I., and Shank, C. V., Appl. Phys. Lett. 38, 671 (1981).
9 Stolk, P. A. et al., Mater. Res. Soc. Symp. Proc. Vol.205 (in press).
10 Nielsen, B., Lynn, K. G., Vehanen, A., and Schultz, P., Phys. Rev. B32, 2296 (1985).
11 Schultz, P. J. et al., Phys. Rev. Lett. 61, 187 (1988).
12 Olson, G. L. and Roth, J. A., Mater. Sci. Rep. 3, 1 (1988).
13 Stolk, P. A., unpublished.
14 Heidemann, K. F., Grüner, M., and te Kaat, E., Rad. Eff. 82, 103 (1984).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed