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Uv Laser-Induced Etching of the First-Row Transition Metals

  • George W. Tyndall (a1)

Abstract

The 248 nm excimer laser-induced etching of Ti, Cr, Fe, Co, Ni, and Cu by Br2 has been studied. The experiment consists of focusing the pulsed UV laser beam at normal incidence onto the surface of a quartz crystal microbalance (QCM) coated with 1μm of polycrystalline metal. Absolute etch rates are determined as a function of the Br2 pressure and the laser fluence. On the basis of the kinetic information, four mechanisms are proposed to explain the etching of these transition metals.

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1. Tyndall, G.W. and Moylan, C.R., Appl. Phys. A, submitted.
2. Burgess, D., Stair, P.C., and Weitz, E., J. Vac. Sci. Technol. A4, 1362 (1986).
3. Colton, R. and Canterford, J. H., Halides of the First Row Transition Metals (Wiley-Interscience, London, 1969).
4. Koren, G. and Hurst, J. E. Jr., Appl. Phys. A 45, 301 (1988).
5. Nakayama, T., Surf. Sci. 133, 101 (1983).
6. Ritsko, J. J., Ho, F., and Hurst, J., Appl. Phys. Lett., 53, 78, (1988).

Uv Laser-Induced Etching of the First-Row Transition Metals

  • George W. Tyndall (a1)

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