The possibilities of SILD (successive ionic layer deposition) technology for modification of surface properties of nano-scaled SnO2 films for gas sensor applications were studied and are discussed in this article. Samples of SnO2 with thickness ranging from 30–40 nm were deposited by spray pyrolysis from SnCl4-water solutions. Nano-clusters of Pd and Ag, deposited by the SILD method were applied for surface modification. PdCl2 and AgNO3 were used as precursors for Pd and Ag deposition on the SnO2 surface.
It was found that the method of surface modification by SILD can be used for improving both the sensitivity and the rate of gas response of SnO2-based gas sensors to CO and H2. At the same time, the presence of Pd and Ag clusters on the surface of SnO2 depresses the gas response to ozone.