Hostname: page-component-848d4c4894-89wxm Total loading time: 0 Render date: 2024-07-06T15:32:21.106Z Has data issue: false hasContentIssue false
  • English
  • Français

Uniform And Large Area Deposition Of Diamond-Like Carbon Using Rf Source Ion Beam

Published online by Cambridge University Press:  21 February 2011

Richard L.C. Wu ,
William Lanter ,
K. Miyoshi ,
S.L. Heidger ,
P. Bletzinger  and
A. Garscadden
Richard L.C. Wu
Affiliation:
UES, Inc. Dayton, OH 45432
William Lanter
Affiliation:
UES, Inc. Dayton, OH 45432
K. Miyoshi
Affiliation:
NASA Lewis Research Center, Cleveland, OH 44135
S.L. Heidger
Affiliation:
NASA Lewis Research Center, Cleveland, OH 44135
P. Bletzinger
Affiliation:
Wright Laboratory (WL/POOC-3), WPAFB, OH 45433
A. Garscadden
Affiliation:
Wright Laboratory (WL/POOC-3), WPAFB, OH 45433
Get access

Abstract

We have designed and constructed a large area ion beam apparatus to deposit DLC films onto 1000 cm2 surfaces with various geometries. The use of an efficient RF excited ion gun (13.56 MHz, 1 kW power, 50-3000 eV ion energy) with a diameter of 20 cm, enables us to generate various hydrocarbon ions with high ion beam currents, varying ionic species and less maintenance. The use of a four axis (Χ-ϒ-Θϒ-ΘZ) substrate scanner with computer control can produce uniform DLC films on large areas and curved surfaces. The effects of RF power, ion energy, gaseous composition, and total pressure on the properties of DLC have been systematically investigated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 354: Symposium A – Beam Solid Interactions for Materials Synthesis and Characterization , 1994 , 63
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Augus, J.C., Koidl, P., Domitz, S., “In Plasma Deposited Thin Film”, Eds. by Mort, J. and Jansen, F., CRC Press, Boca Raton, FL, 1986, Chapter 4.Google Scholar
2 Wu, R.L.C., Surf, and Coat. Tech. 51, 258 (1992).Google Scholar
3 Spencer, E.G., Schmidt, P.H., Joy, D.C., and Sansalone, F.J., J. Appi. Phys. Lett., 29, 118 (1976).Google Scholar
4 Nakaue, H., Mitani, T. and Kurokawa, H., Diamond Films and Technology, 3, 45 (1993).Google Scholar
5 Grill, A. and Patel, V., Diamond Films and Technology, 2, 61 (1992).Google Scholar
6 Vuppuladhadium, R., Jackson, H.E. and Wu, R.L.C., Raman Scattering from Hydrogenated Amorphous Carbon Films, in press, J. Appi, Phys. (1994).Google Scholar