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Understanding ion beam synthesis of nanostructures: Modeling and atomistic simulations

Published online by Cambridge University Press:  17 March 2011

M. Strobel ,
K.-H. Heinig  and
W. Möller
M. Strobel
Affiliation:
Forschungszentrum Rossendorf, Institut für Ionenstrahlphysik und Materialforschung P.O. Box 510 119, D – 01314 Dresden, Germany CNR–IMETEM, Stradale Primosole 50, I – 95121 Catania, Italy MIRIAM, University of Milan, Via C. Saldini 50, I – 20133 Milano, Italy
K.-H. Heinig
Affiliation:
Forschungszentrum Rossendorf, Institut für Ionenstrahlphysik und Materialforschung P.O. Box 510 119, D – 01314 Dresden, Germany
W. Möller
Affiliation:
Forschungszentrum Rossendorf, Institut für Ionenstrahlphysik und Materialforschung P.O. Box 510 119, D – 01314 Dresden, Germany
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Abstract

Ion implantation, specified by parameters like ion energy, ion fluence, ion flux and sub-strate temperature, has become a well-established tool to synthesize buried low-dimensional nanostructures. In general, in ion beam synthesis the evolution of nanostructures is determined by the competition between ballistic and thermodynamic effects. A kinetic 3D lattice Monte-Carlo model is introduced, which allows for a proper incorporation of collisional mixing and phase separation within supersaturated solid-solutions. It is shown, that for both the ballistically and thermodynamically dominated regimes, the Gibbs-Thomson relation is the key ingredient in understanding nanocluster evolution. Various aspects of precipitate evolution during implantation, formation of ordered arrays of nanophase domains by focused ion implantation and compound nanocluster synthesis are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 647: Symposium O – Ion Beam Synthesis & Processing of Advanced Materials , 2000 , O2.3
Copyright
Copyright © Materials Research Society 2001

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