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Trapping and Detrapping of H in Si: Impact on Diffusion Properties and Solar Cell Processing

  • Bhushan Sopori (a1), Y. Zhang (a1), R. Reedy (a1), K. Jones (a1), N. M. Ravindra (a2), S. Rangan (a3) and S. Ashok (a3)...

Abstract

Influence of trapping and detrapping on the diffusion behavior of H in Si is investigated using both experiment and theory. Experimental H (or D) diffusion profiles, produced by plasma and ion implantation processes, are fitted with a theoretical model. This model includes three kinds of traps – stationary, process-induced, and mobile. Excellent correlation between theory and experiment is observed. Best–fit parameters provide an insight into the trapping mechanisms. We also show how some of the problems resulting from trapping can be circumvented by suitable process conditions.

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1. Sana, P., Rohatgi, A., Kalejs, J. and Bell, R. O., Appl. Phys. Lett. 64, 111 (1994)
2. Borenstein, J. T., Corbett, J. W. and Pearton, S. J., J. Appl. Phys. 73, 2751 (1993)
3. Capizzi, M. and Mittiga, A., Physica 146B, 19 (1987).
4. Mathiot, D., Phys. Rev. B 40, 5867 (1989)
5. Kalejs, J. P. and Rajendran, S., App. Phys. Lett. 55, 25 (1989)
6. Borenstein, J. T., Tulchinski, D. and corbett, J. W., Mat. Res. Soc. Symp. Proc. 163, 633 (1990)
7. Rizk, R., Mierry, P. de, Ballutaud, D., Aucouturier, M., and Mathiot, D., Phys. Rev. B 44, 6141 (1991)
8. Wieringen, A. Van and Warmholtz, N., Physica 22, 849 (1956)
9. Hansen, W. L., Pearton, S. J., and, Haller, E. E., Appl. Phys. Lett. 44, 606 (1984)
10. Mogro-Campero, A., Love, R. P., and Schubert, R., J. Electrochem. Soc. 132, 2006 (1985)
11. Johnson, N.M. and Herring, C., and Chadi, D.J., Phys. Rev. Lett. 56, 769 (1986)
12. Johnson, N.M and Herring, C., Inst. Phys. Conf. Ser. 95, 415 (1989)
13. Ichimiya, T., and Furuichi, A., Int. J. Appl. Rad. Isotopes 19, 573 (1968)
14. Johnson, N. M. and Moyer, M.D., Appl. Phys. Lett. 46, 787 (1985)
15. Capizzi, M. and Mittiga, A., Appl. Phys. Lett. 50, 918 (1987)
16. Seager, C.H. and Anderson, R.A., Appl. Phys. Lett. 53, 1181 (1988)
17. Sopori, B. L., Jones, Kim and Deng, Xiao Jun, Appl. Phys. Lett. 61, 2560 (1992)
18. Zhang, Y., Ph. D. Thesis, “Modeling Hydrogen Diffusion for Solar Cell Passivation and Process Optimization,” New Jersey Institute of Technology, 2002
19. Sopori, B. L., Zhang, Y., and Reedy, R., Procd. 29th IEEE-PVSC, New Orleans, May, 2002, to be published

Trapping and Detrapping of H in Si: Impact on Diffusion Properties and Solar Cell Processing

  • Bhushan Sopori (a1), Y. Zhang (a1), R. Reedy (a1), K. Jones (a1), N. M. Ravindra (a2), S. Rangan (a3) and S. Ashok (a3)...

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