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Time-Resolved and Post-Irradiation Studies of the Interaction of High-Power Pulsed Microwave Radiation with Silicon

Published online by Cambridge University Press:  28 February 2011

R. B. James ,
P. R. Bolton ,
R. A. Alvarez ,
R. E. Valiga  and
W. H. Christie
R. B. James
Affiliation:
Sandia National Laboratories, Livermore, CA 94550
P. R. Bolton
Affiliation:
Lawrence Livermore National Laboratory, Livermore, CA 94550
R. A. Alvarez
Affiliation:
Lawrence Livermore National Laboratory, Livermore, CA 94550
R. E. Valiga
Affiliation:
Analytical Chemistry Division, Oak Ridge National Lab, Oak Ridge, TN 37831
W. H. Christie
Affiliation:
Analytical Chemistry Division, Oak Ridge National Lab, Oak Ridge, TN 37831
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Abstract

We have measured the microwave-induced damage to the near-surface region of silicon for 1.9-μs pulses at a frequency of 2.856 GHz and a pulse power of up to 7.2 MW. Rectangular samples were irradiated in a test section of WR-284 waveguide that was filled with freon to a pressure of 30 psig. Incident, transmitted and reflected powers were monitored with directional couplers and fast diodes. The results of the time-resolved optical measurements show that the onset of surface damage is accompanied by a large increase in the reflected power. Examination of the irradiated surfaces shows that the degree of damage is greatest near the edges of the samples. Using secondary ion mass spectrometry to profile the implanted As, we find that the microwave pulses can melt the near-surface region of the material for pulse powers exceeding a threshold value.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 74: Symposium A – Beam-Solid Interactions and Transient Processes , 1986 , 153
Copyright
Copyright © Materials Research Society 1987

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References

1. See, for example, Pulsed Laser Processing of Semiconductors, Vol.23, edited by Wood, R. F., White, C. W. and Young, R. T. (Academic, New York, 1984); and Laser-Solid Interactions and Transient Thermal Processing, edited by J. Narayan, W. L. Brown and R. A. Lemons (North-Holland, New York, 1983).Google Scholar
2. Jackson, J. D., in Classical Electrodynamics, 2nd Edition (Wiley, New York, 1975), p. 298.Google Scholar
3. James, R. B., Narayan, J., Christie, W. H., Eby, R. E., Holland, O. W. and Wood, R. F., in Energy-Beam Solid Interactions and Transient Thermal Processing, edited by Biegelsen, D. K., Rozgonyi, G. A. and Shank, C. V. (MRS, Pittsburgh, 1985), p. 413.Google Scholar