Hostname: page-component-848d4c4894-2xdlg Total loading time: 0 Render date: 2024-06-19T22:12:12.414Z Has data issue: false hasContentIssue false
  • English
  • Français

Three-Dimensional Micro- and Nanofabrication with Multiphoton Absorption

Published online by Cambridge University Press:  01 February 2011

Christopher N. LaFratta ,
Richard A. Farrer ,
Tommaso Baldacchini ,
Juliet Znovena ,
Daniel Lim ,
Anne-Cécile Pons ,
Josefina Pons ,
Kevin O'Malley ,
Zeynel Bayindir  and
Michael J. Naughton
...Show all authors
Christopher N. LaFratta
Affiliation:
Eugene F. Merkert Chemistry Center, Boston College, Chestnut Hill, MA 02467, U.S.A.
Richard A. Farrer
Affiliation:
Eugene F. Merkert Chemistry Center, Boston College, Chestnut Hill, MA 02467, U.S.A.
Tommaso Baldacchini
Affiliation:
Eugene F. Merkert Chemistry Center, Boston College, Chestnut Hill, MA 02467, U.S.A.
Juliet Znovena
Affiliation:
Eugene F. Merkert Chemistry Center, Boston College, Chestnut Hill, MA 02467, U.S.A.
Daniel Lim
Affiliation:
Eugene F. Merkert Chemistry Center, Boston College, Chestnut Hill, MA 02467, U.S.A.
Anne-Cécile Pons
Affiliation:
Department of Physics, Boston College, Chestnut Hill, MA 02467, U.S.A.
Josefina Pons
Affiliation:
Department of Physics, Boston College, Chestnut Hill, MA 02467, U.S.A.
Kevin O'Malley
Affiliation:
Department of Physics, Boston College, Chestnut Hill, MA 02467, U.S.A.
Zeynel Bayindir
Affiliation:
Department of Physics, Boston College, Chestnut Hill, MA 02467, U.S.A.
Michael J. Naughton
Affiliation:
Department of Physics, Boston College, Chestnut Hill, MA 02467, U.S.A.
Bahaa E. A. Saleh
Affiliation:
Department of Electrical & Computer Engineering, Quantum Imaging Laboratory, Boston University, Boston, MA 02215, U.S.A.
Malvin C. Teich
Affiliation:
Department of Electrical & Computer Engineering, Quantum Imaging Laboratory, Boston University, Boston, MA 02215, U.S.A.
John T. Fourkas
Affiliation:
Department of Electrical & Computer Engineering, Quantum Imaging Laboratory, Boston University, Boston, MA 02215, U.S.A.
Get access

Abstract

Multiphoton absorption has become a powerful technique for the creation of three-dimensional micro- and nanostructures. Here we review some of our recent progress towards creating functional microdevices with multiphoton absorption. Specific thrusts of our research include development of new resins for multiphoton absorption polymerization, design of novel schemes for metal deposition, and post-fabrication ablation of polymeric structures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 850: Symposium MM – Ultrafast Lasers for Materials Science , 2004 , MM4.5
Copyright
Copyright © Materials Research Society 2005

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Denk, W., Strickler, J. H., and Webb, W., Science 248, 73 (1990).Google Scholar
2. Maruo, S., Nakamura, O., and Kawata, S., Opt. Lett. 22 (2), 132 (1997).Google Scholar
3. Kawata, S., Sun, H. B., Tanaka, T., and Takada, K., Nature 412 (6848), 697 (2001).Google Scholar
4. Witzgall, G., Vrijen, R., Yablonovitch, E., Doan, V., and Schwartz, B. J., Opt. Lett. 23 (22), 1745 (1998).Google Scholar
5. Cumpston, B. H., Ananthavel, S. P., Barlow, S., Dyer, D. L., Ehrlich, J. E., Erskine, L. L., Heikal, A. A., Kuebler, S. M., Lee, I.-Y. S., McCord-Maughon, D., Qin, J., Rockel, H., Rumi, M., Wu, X.-L., Marder, S. R., and Perry, J. W., Nature 398, 51 (1999).Google Scholar
6. Campagnola, P. J., Delguidice, D. M., Epling, G. A., Hoffacker, K. D., Howell, A. R., Pitts, J. D., and Goodman, S. L., Macromol. 33 (5), 1511 (2000).Google Scholar
7. Belfield, K. D., Ren, X., Van Stryland, E. W., Hagan, D. J., Dubikovsky, V., and Miesak, E. J., J. Amer. Chem. Soc. 122 (6), 1217 (2000).Google Scholar
8. Baldacchini, T., LaFratta, C., Farrer, R. A., Teich, M. C., Saleh, B. E. A., Naughton, M. J., and Fourkas, J. T., J. Appl. Phys. 95 (11), 6072 (2004).Google Scholar
9. Stellacci, F., Bauer, C. A., Meyer-Friedrichsen, T., Wenseleers, W., Alain, V., Kuebler, S. M., Pond, S. J. K., Zhang, Y. D., Marder, S. R., and Perry, J. W., Adv. Mater. 14 (3), 194 (2002).Google Scholar
10. Wu, P.-W., Cheng, W., Martini, I. B., Dunn, B., Schwartz, B. J., and Yablonovitch, E., Adv. Mater. 12 (19), 1438 (2000).Google Scholar
11. Kaneko, K., Sun, H. B., Duan, X. M., and Kawata, S., Appl. Phys. Lett. 83 (7), 1426 (2003).Google Scholar
12. Hidber, P. C., Nealey, P. F., Helbig, W., and Whitesides, G. M., Langmuir 12 (21), 5209 (1996).Google Scholar
13. Georgiou, S. and Hillenkamp, F., Chem. Rev. 103 (2), 317 (2003).Google Scholar