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Thin Polymeric Films Produced by Ion Implantation from Frozen Organic Molecules

Published online by Cambridge University Press:  25 February 2011

L. Calcagno ,
K. L. Sheng  and
G. Foti
L. Calcagno
Affiliation:
Instituto Dipartimentale de Fisica, Università di Catania, Corso Italia 57, I95129, Catania, Italy
K. L. Sheng
Affiliation:
Instituto Dipartimentale de Fisica, Università di Catania, Corso Italia 57, I95129, Catania, Italy
G. Foti
Affiliation:
Instituto Dipartimentale de Fisica, Università di Catania, Corso Italia 57, I95129, Catania, Italy
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Abstract

The synthesis of polymeric films under ion bombardment of frozen benzene has been investigated for the dependence of the thickness on the fluence and beam energy of keV proton and argon ions. Chemical analyses have been performed to characterize the films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 27: Symposium E – Ion Implantation and Ion Beam Processing of Materials , 1983 , 549
Copyright
Copyright © Materials Research Society 1984

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References

REFERENCES

1) Venkatesan, T., Forrest, R.S., Kaplan, M. L. and Wilkens, B. J., J. Appl. Phys. 53, 6 (1983).Google Scholar
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6) Foti, G., Calcagno, L. and Puglisi, O., Nucl. Instr. and Meth., 209/210, 87 (1983).Google Scholar