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Thin Films of (Ba, Sr)TiO3 by Aerosol Combustion

Published online by Cambridge University Press:  10 February 2011

A. Kussmaul ,
A.C. Greenwald ,
C.H. Wei  and
T.F. Morse
A. Kussmaul
Affiliation:
Spire Corporation, One Patriots Park, Bedford, MA 01730–2396
A.C. Greenwald
Affiliation:
Spire Corporation, One Patriots Park, Bedford, MA 01730–2396
C.H. Wei
Affiliation:
Brown Univ. Providence, RI.
T.F. Morse
Affiliation:
Brown Univ. Providence, RI.
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Abstract

Barium-strontium-titanate (BST) films were deposited on platinum-coated ceramic substrates and platinum foil by the aerosol combustion process. A fine mist of metallic precursors in solution was carried into a methane-oxygen flame to produce ceramic particles, which coated the substrate. Both aqueous and purely organic solutions were tested, the latter producing finer powders (less than 100 nm) with high phase purity. Sintering the as-deposited particulate material led to a porous film at all sintering temperatures studied, regardless of the solution used. Cold pressing of the organicsolution- based material prior to heating, without the addition of any binders or solvents, gave a fully dense solid after sintering at 1450°C.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 433: Symposium T – Ferroelectric Thin Films V , 1996 , 39
Copyright
Copyright © Materials Research Society 1996

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References

1. Helble, J. J., “Nanometer oxide ceramic particles with controlled agglomeration,” Materials and Processing Report, 5 (1991).Google Scholar
2. Nonaka, K., Hayashi, S., Okada, K., Otsuka, N., and Yano, T., “Characterization and control of phase segregation in the fine particles of BaTiO3 and SrTiO3 synthesized by the spray pyrolysis method,” J Mater. Res. 6, 1750 (1991).Google Scholar
3. Zachariah, M. R. and Huzarewicz, S., ”Aerosol processing of YPaCuO superconductors in a flame reactor,” J Mater. Res. 6, 264 (1991).Google Scholar
4. See for example Zhang, J., 'Gardiner, R. and Kirin, P. S., Mat. Res. Soc. Proc. 275, 419 (1992).Google Scholar
5. Tsu, R., Liu, H.-Y., Hsu, W.-Y., Summerfelt, S., Aoki, K., and Gnade, B., ”Correlation of BST materials and dielectric properties,” Mat. Res. Soc. Symp. Proc. 361, 275 (1995).Google Scholar
6. Kilian, A., ”Aerosol processes for oxide particle formation and their application to optical waveguides fabrication,” Ph.D. Thesis, Brown University, Division of Engineering, May 1994.Google Scholar
7. To be reported in a separate publication.Google Scholar