Hostname: page-component-848d4c4894-xm8r8 Total loading time: 0 Render date: 2024-06-24T14:26:03.102Z Has data issue: false hasContentIssue false
  • English
  • Français

Thin Film Deposition and Growth Processes by Ionized Cluster Beams

Published online by Cambridge University Press:  28 February 2011

I. Yamada ,
G.H. Takaoka ,
H. Usui  and
S.K. Koh
I. Yamada
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto 606, Japan.
G.H. Takaoka
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto 606, Japan.
H. Usui
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto 606, Japan.
S.K. Koh
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto 606, Japan.
Get access

Abstract

Atomic scale imaging by STM and TEM of the initial stages of film growth of Ag and Au on graphite substrates indicate that the film nucleation processes are markedly different for ionized cluster beam (ICB) and molecular beam (MBE) deposition. Recent results on measurements of cluster size and formation of epitaxial metal-semiconductor layers by ICB are also discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 206: Symposium G – Clusters and Cluster-Assembled Materials , 1990 , 383
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Yamada, I., Mat. Res. Soc. Symp. Proc., 128, 113(1989).Google Scholar
2. Yamada, I., Inokawa, H., and Takagi, T., J. Appl. Phys., 56 2746(1984).Google Scholar
3. Yamada, I., Takaoka, H., Usui, H., and Takagi, T., J. Vac. Sci. Technol., A4, 722(1986).Google Scholar
4. Yamada, I., Vacuum, 41, 889(1990).Google Scholar
5. Yamada, I., Appl. Surf. Sci., 43, 23(1989).Google Scholar
6. Levenson, L.L., Asano, M., Tanaka, T., Usui, H., Yamada, I., and Takagi, T., J, Vac. Sci. Technol., A6, 1552(1988).Google Scholar
7. Gspann, J., Nucl. Instrum. Method., B37 /38, 775(1989).Google Scholar
8. Sosnowski, M., Kronmenhoek, S., Sheen, Jyh, and Cornely, R.H., J. Vac. Sci. Technol., A8, 1458(1990).Google Scholar
9. Usui, H., Tanaka, M., Yamada, I., and Takagi, T., Nucl. Instrum. Method, B37 /38, 886 (1989).Google Scholar
10. Yamada, I., Parmstrøm, C.J., Kennedy, E., Mayer, J.W., Inokawa, H., and Takagi, T., Mat. Res. Soc. Symp. Proc, 37, 401 (1985).Google Scholar
11. Yamada, I., Usui, H., and Takagi, T., J. Phys. Chem., 91, 2463 (1987).Google Scholar
12. Yamamura, Y., Nucl. Instrum. Method., B45, 707(1990).Google Scholar
13. Usui, H., Thesis, Kyoto University(1987).Google Scholar
14. Turner, D.E. and Shanks, H.S., Proc. 12th Symp. on ISIAT89, Tokyo, 249 (1989).Google Scholar
15. Kim, K., Sung, M.Y., Hsieh, K.C., Cowell, E.W., Feng, M.S., and Cheng, K.Y., J. Vac. Sci. Technol., A7, 792 (1989).Google Scholar
16. Brown, W.L., Jarrold, M.F., McEachern, R.L., Sosnowski, M., Takaoka, G., Usui, H., and Yamada, I., to be published.Google Scholar
17. Dahmen, U. and Westmacott, K.H., Proc. Spec. Seminar of ISIAT90, Tokyo, 53 (1990).Google Scholar