Skip to main content Accessibility help

Thin Film Bulk Acoustic Wave Resonators for Continuous Monitoring in the Physical, Chemical and Biological Realms

  • Greg Ashley (a1), Jack Luo (a2), Paul Kirby (a3), Timothy Butler (a4) and David Cullen (a5)...


A transducer that can act as a highly sensitive and reliable universal sensor capable of detecting and continuously monitoring changes in the physical, chemical and biological domains is a potentially useful scientific tool. The Thin Film Bulk Acoustic Wave Resonator (FBAR) is a microwave device that is becoming increasingly recognised as a universal transduction platform with the added advantage of potential integration into CMOS architecture and array-like formats. This work shows preliminary results on FBAR where a continuous monitoring arrangement demonstrated the capability of FBAR to respond to changes in physical parameters such as temperature and light levels, the work goes on further to show the ability of FBAR to respond to changes in humidity in a gas flow and can have sensitivity increased with the addition of hygroscopic polymers on its surface and finally how FBAR can be adapted to act as a biosensor in the form of an immunosensor with sensitivity some orders of magnitude greater than traditional lower frequency bulk acoustic wave platforms.



Hide All
1 Wingqvist, G., Bjurstom, J., Hellgren, A.C. Katardjiev, I.. Sensors and Actuators B127 (2007) 248252
2 Gabl, R.. Feucht, H.D. Zeininger, H. Eckstein, G. Schreiter, M. Primig, R. Pitzer, D. Wersing, W. Biosensors and Bioelectron. 19 (2004) 615620
3 Wingqvist, G., Bjurstom, J., Hellgren, A.C. Katardjiev, I. Sensors and Actuators B123 (2007) 466473
4 Campanella, H., Plaza, J. A., Monserrat, J., Uranga, A., Esteve, J. Microelectron. Eng 86 (2009) 12541257
5 Campenella, H., Hernandez Ramirez, F., Romano Rodriguez, A., Monserat, J., Uranga, A., Barniol, N., Esteve, J. Micromech, J. Microeng. 17. (2007) 23802389.
6 Sauerbrey, G. Z. Phys 155, (1959) 206222.
7 Lin, Y.C. Hong, C.R. H.Chuang, A. Applied Surface Science 254 (2008) 37803786
8 Zhu, Qiu J. Oiler, J. Yu, C. Wang, Z. and Yu, H.. Applied physics letters. 94, (2009)
9 M, V. Mecea. Sensors and Actuators A. 40 (1994) 127.



Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed