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Thermal-Mechanical Evaluation of Plated Electro-Magnetic NiFe for MEMS Generators

Published online by Cambridge University Press:  01 February 2011

Yibin Xue ,
Keithan Hillman  and
David Veazie
Yibin Xue
Affiliation:
Department of Engineering, Clark Atlanta University PO Box 156, 223 James P. Brawley Dr. SW Atlanta, GA 30314
Keithan Hillman
Affiliation:
Department of Engineering, Clark Atlanta University PO Box 156, 223 James P. Brawley Dr. SW Atlanta, GA 30314
David Veazie
Affiliation:
Department of Engineering, Clark Atlanta University PO Box 156, 223 James P. Brawley Dr. SW Atlanta, GA 30314
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Abstract

In micro-electro-mechanical system (MEMS) devices that contain multi-layers of metallic, ceramic, and polymeric materials, acquiring a complete understanding of the mechanical properties and interfacial strength are critical in designing the devices. In general, these layered materials are specially fabricated with thickness of each layer on submicron and/or micron scale. Particularly, the properties of these layered materials strongly depend on the fabrication processes and subsequent treatments. In this paper, we study the magnetic metallic films, NiFe (80/20 in weight), for MEMS generator/motor applications. A set of tensile tests was conducted on the plated nickel-iron metallic films of various thicknesses and subjected to various annealing conditions. Distinctive differences in mechanical behaviors between the electroplated films and the corresponding bulk alloys were observed. Furthermore, the NiFe film as-deposited exhibits almost pure elastic deformation and brittle fracture at room temperature; whereas the NiFe film subjected to annealing exhibits strain hardening and ductile fracture when tested at room temperature. X-ray diffraction was used to capture the variation of crystalline structure and the residual stresses in the electroplated films as deposited and after annealing. An atomic force microscope was used to obtain the surface morphology of the films as deposited and after annealing.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 795: Symposium U – Thin Films - Stresses and Mechanical Properties X , 2003 , U11.35
Copyright
Copyright © Materials Research Society 2004

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References

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