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Thermal and thermoelectric properties of III-nitride and III-oxynitride films prepared by reactive RF sputtering

Published online by Cambridge University Press:  01 February 2011

R. Izaki ,
N. Kaiwa ,
S. Sugimura ,
S. Yamaguchi  and
A. Yamamoto
R. Izaki
Affiliation:
Department of Electrical, Electronic and Information Engineering, Kanagawa University, 3–27–1 Rokkakubashi, Kanagawa-ku, Yokohama 221–8686, Japan
N. Kaiwa
Affiliation:
Department of Electrical, Electronic and Information Engineering, Kanagawa University, 3–27–1 Rokkakubashi, Kanagawa-ku, Yokohama 221–8686, Japan
S. Sugimura
Affiliation:
Department of Electrical, Electronic and Information Engineering, Kanagawa University, 3–27–1 Rokkakubashi, Kanagawa-ku, Yokohama 221–8686, Japan
S. Yamaguchi
Affiliation:
Department of Electrical, Electronic and Information Engineering, Kanagawa University, 3–27–1 Rokkakubashi, Kanagawa-ku, Yokohama 221–8686, Japan Energy Electronics Institute, National Institute of Advanced Industrial Science and Technology, AIST, Tsukuba Central 2, 1–1–1 Umezono, Tsukuba 305–8568, Japan
A. Yamamoto
Affiliation:
Energy Electronics Institute, National Institute of Advanced Industrial Science and Technology, AIST, Tsukuba Central 2, 1–1–1 Umezono, Tsukuba 305–8568, Japan
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Abstract

Towards fabricating a thermoelectric power device using III-nitrides and III-oxynitrides, we studied their thermal and thermoelectric properties and, in particular, we have focused on their thermal conductivity. AInN and AlInON were prepared by reactive radio-frequency sputtering method. We measured the thermal diffusivity and specific heat using the ac calorimetric method, and we estimated values of the thermal conductivity to be 2.2 W/mK (at 773 K) for AlInN and 3.3 W/mK (at 673 K) for AlInON. These values are much smaller than expected considering the large thermal conductivity of nitrides. As for a device composed of 20-pair Chromel-AlInN films, the maximum output power was 0.36 μW at the temperature difference of 180 K, and the open voltage was 0.10 V.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 793: Symposium S – Thermoelectric Materials 2003 - Research and Applications , 2003 , U8.39
Copyright
Copyright © Materials Research Society 2004

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References

REFERENCES

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