Hostname: page-component-77c89778f8-9q27g Total loading time: 0 Render date: 2024-07-20T20:53:49.333Z Has data issue: false hasContentIssue false
  • English
  • Français

Temperature Programmed Desorption of Hydrogen and Deuterium from Cvd Diamond Samples

Published online by Cambridge University Press:  25 February 2011

Michelle T. Schulberg ,
Glenn D. Kubiak  and
Richard H. Stulen
Michelle T. Schulberg
Affiliation:
Sandia National Laboratories, Division 8342, Livermore, CA 94551
Glenn D. Kubiak
Affiliation:
Sandia National Laboratories, Division 8342, Livermore, CA 94551
Richard H. Stulen
Affiliation:
Sandia National Laboratories, Division 8342, Livermore, CA 94551
Get access

Abstract

The desorption kinetics of H2, HD, and D2 from a CVD-grown diamond sample have been measured using temperature programmed desorption. The sample was exposed to hydrogen and deuterium at ∼ 100 K. Molecular hydrogen does not react with the diamond surface but atomic hydrogen chemisorbs. The sample is then heated to 1500 K at a rate of 6 K/s. The hydrogen desorption spectrum from these polycrystalline specimens is surprisingly simple, consisting of a single peak near 1270 K for all coverages studied. The width of the desorption peak is ∼ 100 K. Neither the width nor the peak maximum shift with increasing hydrogen coverage. There is no isotope effect to the desorption. No other desorption products (water, small hydrocarbons) are detected. Kinetic parameters can be extracted from these spectra, and these can be compared to hydrogen desorption from natural diamond single crystal surfaces. These parameters can be used to model diamond growth processes.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 270: Symposium M – Novel Forms of Carbon , 1992 , 401
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Harris, S. J., Appl. Phys. Lett. 56, 2298 (1990); D. N. Belton and S. J. Harris, J. Chem. Phys. 96, 2371 (1992); S. J. Harris and D. N. Belton, Jap. J. Appl. Phys. 30, 2615 (1991).Google Scholar
2. Frenklach, M. and Wang, H., Phys. Rev. B, 43, 1520 (1991).CrossRefGoogle Scholar
3. Coltrin, M. E. and Dandy, D. S., submitted to J. Appl. Phys.Google Scholar
4. The Norton Company, Northboro, MA 01532.Google Scholar
5. Hamza, Alex V., Kubiak, Glenn D. and Stulen, Richard H., Surf. Sci. 237, 35 (1990).Google Scholar
6. Sinniah, K., Sherman, M. G., Lewis, L. B., Weinberg, W. H., Yates, J. T. Jr., and Janda, K. C., Phys. Rev. Lett. 62, 567 (1989).CrossRefGoogle Scholar
7. Koehler, B. G., Mak, C. H., Arthur, D. A., Coon, P. A., and George, S. M., J. Chem. Phys. 89, 1709 (1988).Google Scholar
8. Wyko Corporation, Tucson, AZ 85706.Google Scholar
9. Yates, J. T. Jr., in Methods of Experimental Physics, Vol. 22, edited by Park, R. L. and Lagally, M. G. (Academic Press, New York, 1985) pp. 425–464.Google Scholar
10. Thomas, R. E., Rudder, R. A., and Markunas, R. J., in Proceedings of the Second International Symposium on Diamond Materials, edited by Purdes, A. J. et al. (The Electrochemical Society, Pennington, NJ, 1991) pp. 186–193.Google Scholar
11. Schulberg, M. T., Kubiak, G. D., and Stulen, R. H., to be published.Google Scholar