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Temperature Dependent Current-Voltage Characteristics of TiSi2/n+/p-Si Shallow Junctions
Published online by Cambridge University Press: 25 February 2011
Abstract
Modelling of temperature dependent current-voltage characteristics of TiSi2/n+/p-Si shallow junctions has been presented here. The formation of shallow pn junctions, by ion implantation of As+ through Ti films evaporated on p-Si substrates has been performed in these experiments. The temperature dependent factors such as band gap narrowing, intrinsic carrier concentration, mobilities and diffusivities are considered in the model.
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- Copyright © Materials Research Society 1990