Skip to main content Accessibility help
×
Home

TEM Study of Growth Defects in CVD Diamond Films

  • Fred Y. Chen (a1), Alexander H. King (a2), Robert F. Salat (a2) and Glenn J. Fricano (a2)

Abstract

Transmission electron microscopy (TEM) has been used to examine defects in diamond films grown by the microwave plasma-enhanced chemical vapor deposition (CVD) method. Graphite was used as the sole carbon source during the CVD process with silicon substrates. Growth defects including twins, stacking faults, dislocations and second-phase precipitates were observed in the films. In plan-view TEM, defect clusters at the centers of diamond grains were observed, where the film is also the thickest. Cross-sectional TEM was carried out to show that the defect clusters fan out from a single nucleation site in each grain, at the diamond-silicon interface. Possible growth mechanisms of the defect clusters in diamond grains are considered.

Copyright

References

Hide All
1. Kawarada, H., Mar, K.S., Suzuki, J., Ito, T., Mori, H., Fujita, H. and Hiraki, A., Jpn. J. Appl. Phys. 26, L1903 (1987)
2. Williams, B.E. and Glass, J.T., J. Mater. Res., 4, 373 (1989)
3. Clausing, R.E., Heatherly, L., More, K.L., and Begun, G.M., Surface and Coatings Technology, 39/40, 199 (1989)
4. Kaae, J.L., Gantzel, P.K., Chin, J., and West, W.P., J. Mater. Res. 5, 1480 (1990)
5. Luyten, W., Van Tendeloo, G., Amelinckx, S., and Collins, J.L., Phil. Mag. A, 66, 899 (1992)
6. Shechtman, D., Hutchison, J.L., Robins, L.H., Farabaugh, E.N., and Feldman, A., J. Mater. Res., 8, 473 (1993)
7. Chen, F.Y., Bourdillon, A.J., Tan, N., Jeng, D.G., Salat, R.F., and Fricano, G.J., 4th Annual Diamond Technology Workshop, Madison, Wisconsin, March 2426 (1993)
8. Jeng, D.G., Seibles, L., Mitchell, J.W., Chen, F.Y., Bourdillon, A.J., Salat, R.F., and Fricano, G.J., 4th Annual Diamond Technology Workshop, Madison, Wisconsin, March 2426 (1993)
9. Jeng, D.G., Tuan, H.S., Salat, R.F., and Fricano, G.J., Appl. Phys. Lett. 67, 1968 (1990)
10. Zhang, H., J. Thermal Spray Technology, 1, 83 (1992)
11. Edington, J.W., Interpretation of Transmission Electron Micrographs, Volume 3 (1975)
12. Zalm, P.C., Bulle-Lieuwma, C.W.T. and Marée, P.M., Phillips Tech. Rev. 43, 154 (1987)
13. Nandedkar, A.S. and Narayan, J., Phil. Mag. A, 56, 625 (1987)

TEM Study of Growth Defects in CVD Diamond Films

  • Fred Y. Chen (a1), Alexander H. King (a2), Robert F. Salat (a2) and Glenn J. Fricano (a2)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed