Skip to main content Accessibility help

Tem Studies of GaAs/AlGaAs Heterostructures Grown on Patterned Substrates

  • D. M. Hwang (a1), E. Kapon (a1), M. C. Tamargo (a1), J. P. Harbison (a1), R. Bhat (a1) and L. Nazar (a1)...


Epitaxical growth rates depend strongly on the crystalline orientations of substrate surfaces. Multilayer growth on pre-patterned substrates with various crystal facets exposed results in a large variation of layer thicknesses in the lateral direction. This lateral definition can be used in device applications. Alternating layers of GaAs and AIGaAs were grown by molecular beam epitaxy on (100) GaAs substrates patterned with grooves and ridges along the [01T] and [011] directions by chemical etching. The results were analyzed with transmission electron microscopy using vertical cross-section techniques. Examples of using this method to fabricate ridges with tips of atomic sharpness and quantum-well lasers are presented.



Hide All
1. Tsang, W. T. and Cho, A. Y., Appl. Phys. Lett. 30, 293 (1977).
2. Nagata, S., Tanaka, T., and Fukai, M., Appl. Phys. Lett. 30, 503 (1977).
3. Wu, Y. H., Werner, M., Chen, K. L., and Wang, S., Appl. Phys. Lett. 44, 834 (1984).
4. Smith, J. S., Derry, P. L., Margalit, S., and Yariv, A., Appl. Phys. Lett. 47, 712 (1985).
5. Hersee, S. D., Barbier, E., and Blondeau, R., J. Cryst. Growth 77, 310 (1986).
6. Kapon, E., Tamargo, M. C., and Hwang, D. M., Appl. Phys. Lett. 50, 347 (1987).
7. Hwang, D. M., Kapon, E., Tamargo, M. C., and Bhat, R., in Materials Research Society Symposia Proceedings Vol.77: Interfaces, Superlattices, and Thin Films, edited by Dow, J. D. and Schuller, I. K. (MRS, Pittsburghi1987, p. 773.
8. Kapon, E., Hwang, D. M., Bhat, R., and Tamargo, M. C., to be published in Journal of Superlattices and Microstructures.
9. Kapon, E., Harbison, J. P., Yun, C. P., and Stoffel, N. G., submitted to Appl. Phys. Lett.
10. Sheng, T. T. and Marcus, R. B., J. Electrochem. Soc. 127, 737 (1980).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed