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Tem Observations of AG-TI Bilayers After Thermal Aging Treatment in a Reducing Ambient

  • Adam I. Amali (a1), J.W. Mayer (a1), Yuxiao Zeng (a2), Y.L. Zou (a2), T.L. Alford (a2), F. Deng (a3) and S.S. Lau (a3)...

Abstract

Transmission electron microscopy (TEM) in both cross sectional and plan view is used to study the effect of annealing Ag-Ti bilayers deposited on SiO2/Si substrates in an NH3 ambient. The resulting structure, texture and grain size are investigated. Comparisons are made between films annealed at 400, 500 and 600 °C. Silver films show increasingly strong <111> texture with annealing temperature while exhibiting a bamboo-like grain structure at 600 °C. Considerable grain growth with lateral grain sizes of up to 5 times the thickness of the Ag film is observed at 600 °C. The grains typically extend through the Ag film thickness. The Ti/SiO2 interface uniformity and the absence of voids at the substrate surface are positive indicators of the role of titanium as a good adhesion promoter. At 600 °C, a uniform TiN encapsulation layer is observed on the Ag surface.

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Tem Observations of AG-TI Bilayers After Thermal Aging Treatment in a Reducing Ambient

  • Adam I. Amali (a1), J.W. Mayer (a1), Yuxiao Zeng (a2), Y.L. Zou (a2), T.L. Alford (a2), F. Deng (a3) and S.S. Lau (a3)...

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