Skip to main content Accessibility help

A Systematic Study of Metal-assisted Chemical Etching Parameters for Well-Ordered Silicon Nanowire Array Fabrication

  • Arif S. Alagoz (a1) and Tansel Karabacak (a1)


Metal-assisted chemical etching is a simple and low-cost silicon nanowire fabrication method which allows control of nanowire diameter, length, shape and orientation. In this work, we fabricated well-ordered silicon nanowire array by patterning gold thin film by nanosphere lithography and etching single crystalline silicon wafer by metal-assisted chemical etching technique. We investigated relation between etched solution concentration and nanowire morphology, wafer crystal orientation, etching rate. This well-ordered silicon nanowires arrays have the potential applications in many fields but especially next generation energy related applications from solar cells to lithium-ion batteries.



Hide All
1. Huang, Z., Geyer, N., Werner, P., de Boor, J., and Goesele, U., Adv Mater 23, 2 (2011).
2. Peng, K. Q., Xu, Y., Wu, Y., Yan, Y. J., Lee, S. T., and Zhu, J., Small 1, 11 (2005).
3. Peng, K. Q., Xu, Y., Wu, Y., Yan, Y. J., Lee, S. T., and Zhu, J., Small 1, 11 (2005).
4. Sivakov, V., Andrae, G., Gawlik, A., Berger, A., Plentz, J., Falk, F., and Christiansen, S. H., Nano Letters 9, 4 (2009).
5. Hochbaum, A. I., Chen, R., Delgado, R. D., Liang, W., Garnett, E. C., Najarian, M., Majumdar, A., and Yang, P., Nature 451, 7175 (2008).
6. Peng, K., Jie, J., Zhang, W., and Lee, S., Appl. Phys. Lett. 93, 3 (2008).
7. Qiu, M. C., Yang, L. W., Qi, X., Li, J., and Zhong, J. X., Acs Applied Materials & Interfaces 2, 12 (2010).
8. Xiu, Y., Zhu, L., Hess, D. W., and Wong, C. P., Nano Letters 7, 11 (2007).
9. Peng, K., Lu, A., Zhang, R., and Lee, S., Advanced Functional Materials 18, 19 (2008).
10. Ozdemir, B., Kulakci, M., Turan, R., and Unalan, H. E., Nanotechnology 22, 15 (2011).
11. Peng, K., Zhang, M., Lu, A., Wong, N., Zhang, R., and Lee, S., Appl. Phys. Lett. 90, 16 (2007).
12. Prevo, B. G., and Velev, O. D., Langmuir 20, 6 (2004).
13. Chartier, C., Bastide, S., and Levy-Clement, C., Electrochim. Acta 53, 17 (2008).



Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed