Skip to main content Accessibility help
×
Home

Synthesis and Characterization of Mo(Ta)/MoSix Microlaminates

  • H. Kung (a1), B. M. Vyletel (a1) and A. K. Ghosh (a1)

Abstract

Vapor phase synthesis approaches were employed to produce laminated microstructures with high temperature phases alternated with ductile phase layers for toughness enhancement. Microlaminates of alternating layers of Mo and cosputtered Mo-Si were deposited on a Si substrate using direct current (DC) and radio frequency (RF) sputtering technique. Microstructural evolution and phase formation after diffusion annealing (900°C, 2 hr) was evaluated using cross-sectional transmission electron microscopy (TEM). Heat treating the microlaminates resulted in the growth of a Mo3Si interface phase between Mo and cosputtered layer and conversion of the amorphous cosputtered layer into crystalline Mo5Si3. A higher Si/Mo ratio in the cosputtered layer caused the formation of dispersed Mo5Si3 grains in Mo layer. The residual stress state was measured by monitoring the curvature change of the microlaminates using a laser beam. By decreasing the bilayer thickness to 1/3, the residual stress is reduced by ∼50%.

Copyright

References

Hide All
1. Carter, D.H. and Martin, P.L. in Intermetallic Matrix Composites, edited by Anton, D.L. et al. (Mater. Res. Soc. Proc. 124, Pittsburgh, PA 1990);
Anton, D.L. and Shah, D.M., in Intermetallic Matrix Composites, edited by Anton, D.L. et al. (Mater. Res. Soc. Proc. 124, Pittsburgh, PA 1990)
2. Mendiratta, M.G. and Dimiduk, D.M. in High Temperature Structural Intermetallic Compounds, edited by Liu, C.T. et al. (Mater. Res. Soc. Proc. 133. Pittsburgh, PA 1989).
3. Vyletel, B., Ghosh, A.K. and Van Aken, D.C., in Microcomposites and Nanophase Materials, edited by Van Aken, D.C., Was, G.S. and Ghosh, A.K. (TMS, Warrendale, PA, 1991), in press.
4. Battacharya, R.S., Rai, A.K. and Mendiratta, M.G., in Intermetallic Matrix Composites, edited by Anton, D.L. et al. (Mater. Res. Soc. Proc. 194. Pittsburgh, PA 1990).
5. Schuller, I.K., in Phvsics. Fabrication, and applications of Multilavered Structures, edited by Dhez, P. and Weisbuch, C. (Plenum Press, New York, 1988), p. 139.
6. Pan, J.T. and Blench, Dan, J. Appl. Phys. 55, 2874 (1984).
7. Nava, F., Majni, G., Cantoni, P., Pignatel, G., Ferla, G., Cappelletti, P. and Mori, F., Thin Solid Films 94, 59 (1982).

Synthesis and Characterization of Mo(Ta)/MoSix Microlaminates

  • H. Kung (a1), B. M. Vyletel (a1) and A. K. Ghosh (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed