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Synchrotron Radiation for Measurement of Contaminants on Silicon Surfaces

  • Michael C. Madden (a1), David C. Wherry (a2), Piero Pianetta (a3) and Sean Brennan (a3)


The detection limit for aluminum using total reflection x-ray fluorescence (TXRF) is approximately 100 times lower for a synchrotron source compared to a conventional source. The detection limit for transition metals is approximately 15 to 40 times lower depending on atomic number and energy of the incident radiation.



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1. Bertin, P., Principles and Practice of X-Ray Analysis, 2nd ed. (Plenum Press, New York-London), p. 529–532.


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