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Surface Chemical Studies of Oxides and Nitrides

  • Carlo G. Pantano (a1)


The application of surface analysis techniques for the study of fundamental surface and thin film phenomena is described. The topics covered relate to the processing and fabrication of electronic packages and include: evaporation/condensation during the thermal processing of glasses, hydration of glass surfaces and thin films, nitridation of silica films, diffusion behavior in oxides at low temperature, and impurity segregation in thin films. A wide variety of surface analytical methods are exemplified including Auger electron spectroscopy (AES), ion-scattering spectroscopy (ISS), nuclear reaction analysis (NRA), secondary-ion mass spectroscopy (SIMS) and x-ray photoelectron spectroscopy (XPS).



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5. Dettmer, E. S., et al, Epoxy Characterization and Testing Using Mechanical, Electrical and Surface Analysis Techniques, Int. J. Hybrid Microelectronics, 6, 375 (1983).
6. Pantano, C. G., Surface and In-Depth Analysis of Glass and Ceramics, Am. Ceram. Soc. Bull., 60, 1154 (1981).
7. Kelso, J. F. and Pantano, C. G., Spectroscopic Examination of Clean Glass Surfaces at Elevated Temperature, to appear J. Vac. Sci. Technol., 1985.
8. Lanford, W. A., et al., Nuclear Reaction Analysis of Glass Surfaces, Materials Science Research, 15, 549 (1983).
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10. Colombin, L., et al., Penetration of Tin in the Bottom Surface of Float Glass: A Snythesis, J. Non-Cryst. Sol., 38, 551 (1980).
11. Suscavage, M. J. and Pantano, C. G., Tin Penetration into a Soda-Lime-Magnesia-Silica Glass, Glass Techn. Ber., 56K, 498 (1983).
12. Shelby, J. E., Vitko, J. and Pantano, C. G., Weathering of Glasses for Solar Applications, Solar Energy Mat., 3, 97 (1980).
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18. Nemetz, J. A. and Tressler, R. E., Thermal Nitridation of Silicon and Silicon Dioxide for Thin Gate Insulators, Solid State Techn., 79 (February 1983), 209 (September 1983).
19. Pantano, C. G., Glaser, P. M. and Armbrust, D. H., Nitridation of Silica Sol/Gel Thin Films in Ultrastructure Processing of Ceramics, Glasses and Composites, (John Wiley, New York, 1983).
20. Brow, R. K. and Pantano, C. G., Composition and Chemical Structure of Nitrided Silica Gel, in Better Ceramics Through Chemistry (Elsevier, 1984).
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25. U. S. Patent
26. Schmid, R. S. and Pantano, C. G., Titanium Impurity Effects in Thin Film Oxide Cathodes, to appear in Appl. Surf. Sci., 1985.

Surface Chemical Studies of Oxides and Nitrides

  • Carlo G. Pantano (a1)


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