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Surface Acoustic Waves And Guided Optical Waves In AlGaN Films

  • Gang Bu (a1), Daumantas Ciplys (a1) (a2), Michael Shur (a1), Remis Gaska (a3), Qhalid Fareed (a3), Romualdas Rimeika (a2), Jinwei Yang (a4) and Asif Khan (a4)...

Abstract

AlxGa1-xN layers grown by MOCVD on sapphire substrates have been tested using the surface acoustic wave and guided optical wave techniques. Samples with molar fraction of Al up to 0.36 have been investigated. The parameters S11 of single surface acoustic wave transducers and S12 of two-port devices have been measured with the network analyzer. The values of the surface acoustic wave velocity and electromechanical coupling coefficient for the layer-substrate structure have been extracted and calculated using material parameters available from literature. The attenuation of guided optical waves along the propagation track in AlxGa1-xN layers has been measured using the CCD imaging technique. The attenuation dependence on the mode order and layer thickness has been studied. Our results show that the properties of AlxGa1-xN that determine surface acoustic wave and guided optical wave propagation are similar to the properties of GaN films within a relatively wide range of x up to x =0.36.

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Surface Acoustic Waves And Guided Optical Waves In AlGaN Films

  • Gang Bu (a1), Daumantas Ciplys (a1) (a2), Michael Shur (a1), Remis Gaska (a3), Qhalid Fareed (a3), Romualdas Rimeika (a2), Jinwei Yang (a4) and Asif Khan (a4)...

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