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Superconducting Yba2Cu3O7-δ Thin Films on Srtio3 and Si Grown In-Situ by Ion Beam Sputtering

Published online by Cambridge University Press:  28 February 2011

B.J. Kellett ,
J.H. James ,
A. Gauzzi ,
M. Affronte  and
D. Pavuna
B.J. Kellett
Affiliation:
Institute of Micro and Optoelectronics, Department of Physics, Swiss Federal Institute of Technology, (E.P.F.L), CH‐1015, Lausanne, Switzerland
J.H. James
Affiliation:
Institute of Micro and Optoelectronics, Department of Physics, Swiss Federal Institute of Technology, (E.P.F.L), CH‐1015, Lausanne, Switzerland
A. Gauzzi
Affiliation:
Institute of Micro and Optoelectronics, Department of Physics, Swiss Federal Institute of Technology, (E.P.F.L), CH‐1015, Lausanne, Switzerland
M. Affronte
Affiliation:
Institute of Micro and Optoelectronics, Department of Physics, Swiss Federal Institute of Technology, (E.P.F.L), CH‐1015, Lausanne, Switzerland
D. Pavuna
Affiliation:
Institute of Micro and Optoelectronics, Department of Physics, Swiss Federal Institute of Technology, (E.P.F.L), CH‐1015, Lausanne, Switzerland
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Abstract

Superconducting YBa2Cu3O7‐δ (YBCO) films 100‐300nm thick have been grown in‐situ on (100) SrTiO3 at 650°C by ion beam sputtering. Targets of Cu, CuO, Y, Y2O3, BaF2, BaCO3 and YBa2Cu3O7‐δ have been studied. Uniform composition throughout the film thickness has been achieved by co‐sputtering. Films are metallic (p300=300μΩcm) and textured, with Tc onsets at 92K and Tco=82K. Jc(77K) exceeds 105 Acm‐2. Films grown in‐situ on Si with ZrOx/Y2O3 and In2O3(10 at.%SnO2) buffer layers show Tc onsets at about 90K and Tco at about 50K, annealing improves Tco to 60K with resistivities p30o=2000μΩcm and 4000μΩcm respectively.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 169: Symposium M – High Temperature Superconductors: Fundamental Properties and Novel Materials Processing , 1989 , 639
Copyright
Copyright © Materials Research Society 1990

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References

1 Michel, S., James, J.H., Dwir, B., Kellett, B.J. and Pavuna, D.. “The Preparation of YBCO Thin Films by a Four Ion Beam Co‐Deposition System”, J. Less Common Metals, Vol 151, pp 419‐427, (1989).Google Scholar
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