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Study of the Transverse Piezoelectric Coefficient of Pb(Zr,Ti)O3 Thin Films as a Function of Texture and Composition

Published online by Cambridge University Press:  10 February 2011

A. Seifert ,
N. Ledermann ,
S. Hiboux  and
P. Muralt
A. Seifert
Affiliation:
Ceramics Laboratory, Materials Department, EPFL Swiss Federal Institute of Technology, CH-1015 Lausanne, Switzerland.
N. Ledermann
Affiliation:
Ceramics Laboratory, Materials Department, EPFL Swiss Federal Institute of Technology, CH-1015 Lausanne, Switzerland.
S. Hiboux
Affiliation:
Ceramics Laboratory, Materials Department, EPFL Swiss Federal Institute of Technology, CH-1015 Lausanne, Switzerland.
P. Muralt
Affiliation:
Ceramics Laboratory, Materials Department, EPFL Swiss Federal Institute of Technology, CH-1015 Lausanne, Switzerland.
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Abstract

The effective transverse piezoelectric coefficient was measured on 1 μm thick sol-gel processed Pb(Zr,Ti)O3 (PZT) thin films as a function of texture and composition. Optimal values were obtained with PZT films of {100} texture near the morphotropic phase boundary (53/47). The best value amounted to -12 C/m2

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 596: Symposium Y – Ferroelectric Thin Films VIII , 1999 , 535
Copyright
Copyright © Materials Research Society 2000

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