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A Study of Ta2O5 for use as High Temperature Piezoelectric Sensors

Published online by Cambridge University Press:  10 February 2011

B. R. Jooste  and
H. J. Viljoen
B. R. Jooste
Affiliation:
Department of Chemical Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588–0126, Tel: (402) 472–9318, Fax: (402) 472–6989
H. J. Viljoen
Affiliation:
Department of Chemical Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588–0126, Tel: (402) 472–9318, Fax: (402) 472–6989
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Abstract

Acoustic sensors which can function at high temperatures have important potential uses. In this work we report on the deposition, characterization and qualitative assessment of piezoelectric behaviour of orthorhombic Ta2O5• It is shown that orthorhombic Ta2O5 belongs to the class 2mm. XRD analysis of films annealed for 1 min., 10 min. and 1 hr at 800°C and 900°C reveal the formation of (0 0 1), (1 10 0) and (1 11 0) orientations at 800 °C, but the (1 10 0) increases at the expense of the other two as the annealing period is extended. At 900°C the dominant orientations are (1 10 0) and (2 9 0). The piezoelectric effect is significantly stronger after annealing and the stronger piezoelectric effect does not correlate with the presence of (1 10 0) and (2 9 0) so much as with the absence of (0 0 1) and (1 11 0).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 459: Symposium Y – Materials for Smart Systems II , 1996 , 195
Copyright
Copyright © Materials Research Society 1997

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References

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