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Study of Mechanical and Elastic Properties of Diamond Films by Surface Acoustic Wave Spectroscopy (SAWS)

Published online by Cambridge University Press:  15 February 2011

R. Kuschnereit  and
P. Hess
R. Kuschnereit
Affiliation:
University of Heidelberg, Institute of Physical Chemistry, Im Neuenheimer Feld 253, D-69120 Heidelberg, Germany
P. Hess
Affiliation:
University of Heidelberg, Institute of Physical Chemistry, Im Neuenheimer Feld 253, D-69120 Heidelberg, Germany
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Abstract

The density and elastic properties of a 1.9 μm thick polycrystalline diamond film deposited on a silicon substrate were measured by surface acoustic wave (SAW) spectroscopy. A density of 3.45±0.05 g/cm3, Young's modulus of 940 ± 20 GPa and Poisson's ratio below 0.12 were determined from the dispersion of a broadband coherent surface acoustic wave pulse propagating in the layered system. The surface wave pulses were generated using a ns UV laser pulse and detected with a piezoelectric foil transducer.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 383: Symposium I – Mechanical Behavior of Diamond and Other Forms of Carbon , 1995 , 121
Copyright
Copyright © Materials Research Society 1995

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References

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