Hostname: page-component-76fb5796d-9pm4c Total loading time: 0 Render date: 2024-04-26T20:25:14.723Z Has data issue: false hasContentIssue false
  • English
  • Français

A Study Of Anisotropy Of Spin Cast And Vapor Deposited Polyimide Films Using Internal Reflection Techniques

Published online by Cambridge University Press:  15 February 2011

Vladimir Liberman ,
Vincent Malba  and
Anthony F. Bernhardt
Vladimir Liberman
Affiliation:
Lawrence Livermore National Lab, P. O. Box 808, L-27 1, Livermore, CA 94550
Vincent Malba
Affiliation:
Lawrence Livermore National Lab, P. O. Box 808, L-27 1, Livermore, CA 94550
Anthony F. Bernhardt
Affiliation:
Lawrence Livermore National Lab, P. O. Box 808, L-27 1, Livermore, CA 94550
Get access

Abstract

We have compared anisotropy of spin cast and vapor deposited polyimide (VDP) films, using internal reflection infrared spectroscopy. The films were deposited directly on the internal reflection element. We find that spin cast films are more anisotropic than their VDP counterparts, with the polyimide chains tending to align parallel to the substrate. Both films are found to contain more and less ordered regions. Within the ordered regions, the plane of the phenyl ring tends to align parallel to the substrate.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 443: Symposium H – Low-Dielectric Constant Materials II , 1996 , 15
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Iijima, M., Takahashi, Y., U. S. Patent 4 6248 67 (1986)Google Scholar
2. Salem, J. R., Sequeda, F. O., Duran, J., Lee, W. Y. and Yang, R. M., J. Vac. Sci. Technol. 4, 369 (1986).Google Scholar
3. Jensen, R. J. and Lai, J. H., in Polymers for Electronic Applications. edited by Lai, J. H., (CRC Press, Boca Raton, Florida, 1989) p. 33.Google Scholar
4. Deutsch, A., Swaminathan, M., Ree, M. H., Surovic, C. W., Arjavalingam, G., Prasad, K., McHerron, D. C., McAllister, M., Kopcsay, G. V., Girn, A. P., Perfecto, E. and White, G. E., IEEE Transactions on Components, Packaging and Manufacturing Technology, Part B: Advanced Packaging 17, 486 (1994).Google Scholar
5. Pottiger, M. T., Coburn, J. C. and Edman, J. R., J. Polym. Sci. B: Polym. Phys. 32, 825 (1994).Google Scholar
6. Takahashi, N., Yoon, D. Y. and Parrish, W., Macromolecules 17, 2583 (1984).Google Scholar
7. Liberman, V., Malba, V. and Bernhardt, A. F., to be published(1996).Google Scholar
8. Ishida, H., Wellinghoff, S. T., Baer, E. and Koenig, J. L., Macromolecules 13, 826 (1980).Google Scholar
9. Boese, D., Lee, H., Yoon, D. Y., Swalen, J. D. and Rabolt, J. F., J. Polym. Sci. B: Polym. Phys. 30, 1321 (1992).Google Scholar
10. Iida, K., Chen, Y. H., Nakamura, S., and Sawa, G., Proc. IEEE Conf. on Electr. Ins. and Diel. Phenom., 731 (1994).Google Scholar