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Studies of Si Surface Chemistry and Epitaxy Using Scanning Tunneling Microscopy and Spectroscopy

  • Phaedon Avouris (a1) and Robert Wolkow (a1)

Abstract

We apply scanning tunneling microscopy (STM) and spectroscopy (STS) to study the reaction of NH3 with Si(111)-(7×7), and the epitaxial growth of CaF2 on Si(11). By a combination of topographs and atom-resolved spectra we can follow the spatial distribution of the reaction and changes in electronic structure with atomic resolution. We find that there are strong site-selectivities for the NH3 reaction on the 7×7 surface. We also observe the initial stages of the CaF2 deposition and even are able to image insulating multi-layer CaF2 films.

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Studies of Si Surface Chemistry and Epitaxy Using Scanning Tunneling Microscopy and Spectroscopy

  • Phaedon Avouris (a1) and Robert Wolkow (a1)

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