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Structured Polysilicon for Photonic Applications

Published online by Cambridge University Press:  15 February 2011

J.G. Fleming  and
Shawn-Yu Lin
J.G. Fleming
Affiliation:
Sandia National Laboratories, Albuquerque NM 87185, fleminjg@sandia.gov
Shawn-Yu Lin
Affiliation:
Sandia National Laboratories, Albuquerque NM 87185, fleminjg@sandia.gov
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Abstract

Three-dimensional photonic lattices have been fabricated in the infrared using a combination of advanced silicon processes. The structures display bandgaps centered at 12μ. and 1.55μ.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 557: Symposium A – Amorphous and Heterogeneous Silicon Thin Films—Fundamentals to Devices—1999 , 1999 , 615
Copyright
Copyright © Materials Research Society 1999

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